（总第297期）电子工业专用设备EquipmentforElectronicProductsManufacturingEEPMDec．2022收稿日期：2022-09-05成像物镜集成公差分配与定心装调技术研究李星辰，武震，高爱梅，申淙，张乾(中国电子科技集团公司第四十五研究所，北京100176)摘要：针对高分辨率对准成像镜头对装配误差的严苛要求，提出了一种成像物镜装配公差分配和定心装调技术以满足光学系统集成要求。以分辨率为2μm的成像物镜为例，分析了影响光学镜头成像质量的误差来源，进行了公差仿真分析和加工公差分配。集成测试过程中以中心偏差测量仪为辅助工具，进行了镜组光轴精确校准，其光轴偏心小于20μm，光轴倾斜小于144″。最后将集成结果数据代入光学仿真软件进行像质分析并实测图像结果进行对比分析。结果表明：运用该方法，各镜片间的光轴偏心误差和倾斜误差能够匹配公差分配要求，成像效果满足镜头像质需求。关键词：成像物镜；公差分配；定心装调；像质分析中图分类号：TN206文献标志码：B文章编号：1004-4507(2022)06-0017-05ResearchonIntegratedToleranceAllocationandCenteringAdjustmentTechnologyofImagingObjectiveLensLIXingchen，WUZhen，GAOAimei，SHENCong，ZHANGQian(The45thResearchInstituteofCETC，Beijing100176，China)Abstract:Akindofimagingobjectivelensassemblytolerancedistributionandacenteringtechniquefortheintegrationrequirementsofopticalsystemsareproposedforthehighscorediscriminationrate，whichisaimedatthestrictrequirementsoftheimagingobjectivelensfortheassemblyerror.Inthispaper，theerrorsourceoftheopticallensimagingqualityisanalyzedbytheresolutionof2μm，andthetolerancesimulationanalysisandmachiningtolerancedistributionarecarriedout.Intheprocessofintegratedtesting，thecenterdeviationmeasuringinstrumentisusedfortheauxiliaryaid，andtheopticalaxisiscalibratedaccurately，andtheshift-errorofopticalaxisislessthan20μm.Thetilt-errorofopticalaxisislessthan144″.Finally，theintegrationresultsareanalyzedbytheanalysisofthedataandtheresultsofthemeasuredimage.Theresultsshowthattheopticalaxisshift-errorandthetilt-errorcanmatchthetolerancedistributionrequirements，andtheimagingeffectsatisfiestherequirementsofthelens'imagingquality.半导体制造工艺与设备17（总第297期）电子工...
