1EE5514ICYIELD,RELIABILITYANDFAILUREANALYSISOPTICALTECHNIQUES:LightMicroscopy-basedToolsDr.Wai-KinWongDepartmentofElectrical&ComputerEngineeringNationalUniversityofSingaporeE-mail:elewwk@nus.edu.sgTel:6516-2086Room:E4-08-04EE55142006-07WKWong2OPTICALTECHNIQUESLearningObjectives:•Understandphotonicimagingphysicsinsemiconductorapplications•Attributes&operatingprinciplesofvariousopticaltools•RoleandapplicationofopticaltoolsinglobalfailuresiteisolationEE55142006-07WKWong3LIGHTMICROSCOPY–REFERENCESReferences/SuggestedReading•WKChim,"SemiconductorDeviceandFailureAnalysisUsingPhotonEmissionMicroscopy",JohnWiley,2000•FloridaStateUniversity-MolecularExpressionsVirtualMicroscopyweb(http://micro.magnet.fsu.edu)•SupplementaryReadingPapersEE55142006-07WKWong4MICROSCOPYTIMELINEAtomicForceMicroscopeGerdBinnig,CalvinQuate,ChristophGerber1986NSOM/SNOMDieterPohl,WinfriedDenk,andM.Lanz1984ScanningTunnelingMicroscopeGerdBinnigandHeinrichRohrer,Gerber1981SIMSRichardHonig/HWWerner1958ConfocalMicroscopyMarvinMinsky1955SEMVladimirZworykin1942ScanningTEMManfredVonArdenne1938TEMMaxKnoll/ErnstRuska1931AES(Concept)PierreAuger1923XPS(fromPhotoelectroneffect)AlbertEinstein1905FirstcompoundlightmicroscopeZacchariasandHansJanssen1590EyeglassesSalvinoD'Armate1284InventionInventorDateEE55142006-07WKWong5OPTICALMICROSCOPYBasicConceptsDetectionofphotonsfromUVtoIRrangeEE55142006-07WKWong6OPTICALMICROSCOPY•Resolutiongenerallyproportionaltowavelength,whetherdiffractionoropticalaberrationlimited(forfar-fieldoptics,i.e.workingdistance>>λ)•BandgapeV->maxwavelengthforphotongeneration(directbandgaprecombination)105–10910-14-10-101019-102410-11-10-14GammaRays102–10510-17-10-141017-101910-9-10-11X-Rays3-10210-19-10-171014-101710-6-10-9UltraViolet1–310-19101410-6Visible10-4–110-23-10-191012-101410-4-10-6InfraRed10-11-10-410-30-10-231010-101210-1-10-4MicroWaves10-11-10-410-30-10-23103-1010104-10-1RadioWavesEnergy(eV)Energy(J)Frequency(Hz)Wavelength(m)NameEE55142006-07WKWong7OPTICALMICROSCOPYDefin...
