收稿日期:2022-08-22.*通信作者:陈超E-mail:chenchao@uestc.edu.cn光电器件DOI:10.16818/j.issn1001-5868.2022082201双层伞状开孔的微测辐射热计红外吸收分析蒋君贤,王涛,陈超*,吴志明,王军(电子科技大学光电科学与工程学院,成都610054)摘要:建立了具有伞状吸收层结构的微测辐射热计探测单元的红外吸收模型。基于光学导纳矩阵法和阻抗匹配理论,采用三维电磁仿真软件CST,对伞状结构不同开孔尺寸和形状下模型的红外吸收特性进行了分析。结果表明,双层伞状开孔微测辐射热计光学性能与伞状结构开孔大小有密切的关系。该伞状微测辐射热计中引入开孔后,在保持较高的红外吸收特性的基础上,减少了探测单元热容,从而提升了器件响应速度。最终所得探测单元在8~14μm红外波段内的平均吸收率为85%,满足超大规模小像元非致冷红外焦平面探测器的设计要求。关键词:微测辐射热计;光学仿真;小像元;吸收率;微桥结构中图分类号:TN215文章编号:1001-5868(2023)01-0044-05InfraredAbsorptionAnalysisofMicrobolometerwithTwo-LayerUmbrella-ShapedOpeningsJIANGJunxian,WANGTao,CHENChao,WUZhiming,WANGJun(SchoolofOptoelectronicScienceandEngin.,UniversityofElectronicScienceandTechnol.ofChina,Chengdu610054,CHN)Abstract:Aninfraredabsorptionmodelformicrobolometerdetectionunitswithanumbrella-shapedabsorptionlayerstructureareestablished.Basedontheopticaladmittancematrixmethodandimpedancematchingtheory,theinfraredabsorptioncharacteristicsofthemodelunderdifferentaperturesizesandshapesoftheumbrellastructurearesimulatedusingthree-dimensionalelectromagneticsimulationsoftwareCST.Theresultsshowthattheopticalperformanceofthedual-layerumbrella-shapedaperturemicrobolometeriscloselyrelatedtotheaperturesizeoftheumbrellastructure.Theintroductionoftheapertureintheumbrella-shapedmicrobolometerreducestheheatcapacityofthedetectionunitwhilemaintaininghighinfraredabsorptioncharacteristics,therebyimprovingdeviceresponsespeed.Theresultingdetectionunithasanaverageabsorptionrateof85%inthe8~14μminfraredband,meetingthedesignrequirementsoflarge-scalesmall-pixelnon-cooledinfraredfocalplanedetectors.Keywords:microbolometer;opticalsimulation;smallpixel;absorptivity;micro-bridgestructure0引言近年来,非...
