2023年第5期一种基于交指结构传感器的非金属膜厚度检测方法宋强,文雨蒽,王自强,黄俊松(成都工业学院自动化与电气工程学院,成都611730)摘要:金属部件常常在易摩擦损坏金属表面的环境中使用,为了保护金属,常常在金属部件外镀一层非金属膜保护金属。若非金属膜太薄将不能起到保护金属部件的作用,若非金属薄膜太厚,膜表面的均匀度控制较难,非金属膜厚度的不均匀性进而会导致薄膜器件的特征波长度发生变化,而膜层整体误差则会导致非金属膜的性能下降。微波在检测领域有很大的优势,通过微波对非金属材料具有很大的穿透性可以检测非金属膜的厚度。本文提出了一种基于交指结构的新型传感器,用于测量薄膜涂层金属的涂层厚度。实验成功检测到0.9mm~1.2mm镀在铝表面的PVC膜厚度。关键词:微波近场;交指结构;传感器标签;谐振频移中图分类号:TG178文献标识码:A文章编号:1674-957X(2023)05-0076-03ANon-metallicFilmThicknessDetectionMethodBasedonCross-FingerStructureSensorSongQiang,WenYu-en,WangZi-qiang,HuangJun-song(ChengduTechnologicalUniversity,SchoolofAutomationandElectricalEngineering,Chengdu611730,China)Abstract:Metalpartsareoftenusedintheenvironmentwherethemetalsurfaceiseasilydamagedbyfriction,inor-dertoprotectmetal,anon-metallicfilmisoftencoatedonthemetalpartstoprotectmetal.Ifthenon-metallicfilmistoothin,itcannotprotectthemetalparts.Ifthenon-metallicfilmistoothick,itisdifficulttocontroltheuniformityofthefilmsurface.Thenon-uniformityofthethicknessofthenon-metallicfilmwillleadtothechangeofthecharacteristicwavelengthofthefilmdevice,andtheoverallerrorofthefilmwillleadtothedeclineoftheperformanceofthenon-me-tallicfilm.Microwavehasgreatadvantagesinthefieldofdetection.Ithasgreatpenetrabilitytonon-metallicmaterialstodetectthethicknessofnon-metallicfilms.Inthispaper,anewsensorbasedoninterdigitalstructureisproposedtomeas-urethecoatingthicknessoffilmcoatedmetal.ThePVCfilmthicknessof0.9mm~1.2mmplatedonaluminumsurfacewassuccessfullydetectedintheexperiment.Keywords:Microwavenear-field;Cross-fingerstructure;Sensorlabel;Resonantfrequencyshift基金项目:四川省大学生创新训练项目,基于微波技术的非金属复合材料内部缺陷检测研究,项目编号:S202211116039作者简介:宋...
