=================================DOI:10．13290/j．cnki．bdtjs．2023．07．010July2023SemiconductorTechnologyVol．48No．76110.2THz平衡式二倍频器两路功率合成技术高颖(中国电子科技集团公司第十三研究所，石家庄050051)摘要:针对GaAs肖特基二极管基倍频器输出功率低的问题，采用Y型结结构的波导功分器/功合器在倍频器子模块外部进行信号的合成，实现了输出功率的提升。设计实现了插入损耗低、幅度/相位一致性良好的Y型结结构的波导功分器/功合器。基于GaAs肖特基二极管单片工艺，研制了二倍频器子模块，以提高子模块的一致性并降低芯片结温。对波导功分器/功合器及二倍频子模块进行了装配和测试，测试结果表明，该外合成式二倍频器的工作频率为209～216GHz，当输入功率大于600mW时，在214GHz频率下，峰值输出功率可达117mW，转换效率达到18.5%，合成效率达86.5%。关键词:太赫兹(THz);倍频器;功率合成器;Y型结;波导中图分类号:TN771文献标识码:A文章编号:1003－353X(2023)07－0611－06Two-WayPowerCombiningTechnologyfor0.2THzBanlancedFrequencyDoublerGaoYing(The13thＲesearchInstitute，CETC，Shijiazhuang050051，China)Abstract:ToaddressthelowoutputpowerissueoftheGaAsSchottkydiode-baseddoubler，Y-junctionwaveguidepowerdivider/combinerwereadoptedtosynthesizethesignaloutsidethefrequencydoublersubmodulestoimprovetheoutputpower．Y-junctionwaveguidepowerdivider/combinerwithlowinsertionlossandgoodamplitude/phaseconsistencyweredesignedandrealized．ThefrequencydoublersubmoduleswerefabricatedbasedonGaAsSchottkydiodemonolithicprocesstoimprovetheconsistencyofsubmodulesandreducethechipjunctiontemperature．Thewaveguidepowerdivider/combinerandfrequencydoublersubmoduleswereassembledandtested．Thetestresultsshowthattheexternalsynthesistypefrequencydoublercanoperatein209－216GHz．Whentheinputpowerisabove600mW，thepeakoutputpowercanreach117mWwithaconversionefficiencyof18.5%andasynthesisefficiencyof86.5%atthefrequencyof214GHz．Keywords:terahertz(THz);frequencydoubler;powercombiner;Y-junction;waveguideEEACC:12500引言太赫兹波是指0.1～10THz的电磁波，具有非常丰富的频谱资源，被认为是下一代移动通信的关键技术之一［1］。高功率太赫兹倍频源能够使信号传输到更远距离...
