高纯三氧化二镓杂质含量的测定 电感耦合等离子体质谱法 YST 980-2014.pdf

YS/T980-2014前言本标准按照GB/T1.1-2009给出的规则起草。本标准由全国有色金属标准化技术委员会(SAC/TC243)归口。本标准起草单位：峨嵋半导体材料研究所、南京中锗科技股份有限公司、广东先导稀材股份有限公司。本标准主要起草人：刘爱华、孙平、种娜、郑孝桃、杨海燕、朱赞芳、陈劼、刘心君。YS/T 980-20147精密度7.1重复性在重复性条件下获得的两次独立测试结果的测定值，在表1给出的平均值范围内，这两个测试结果的绝对差值不超过重复性限r;超过重复性限r的情况不超过5%，重复性限按表1数据采用线性内插法求得。表1元素质量分数wx重复性限质量分数wx重复性限元素%0.0110-0.0510-0.0210-0.0110-0.0510-0.0210-钠0.0510-0.1010-0.0310-0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.0210-0.0110-0.0510-0.0210-镁0.0510-0.10100.0310钛0.05100.1010-0.03100.1010-0.40100.05100.1010-0.40100.05100.0110-0.0510-0.0210-0.0110-0.0510-0.0210-钙0.0510-0.1010-0.0310-锡0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.0210-0.0110-0.0510-0.0210-铬0.0510-0.1010-0.0310-铁0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.0210-0.0110-0.0510-0.0210-锰0.0510-0.1010-0.0310-钴0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.0210-0.0110-0.0510-0.0210-镍0.0510-0.1010-0.0310-0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.02100.0110-0.0510-0.0210铜0.0510-0.10100.0310钒0.0510-0.1010-0.0310-0.1010-0.4010-0.0510-0.1010-0.4010-0.0510-0.0110-0.0510-0.0310-锌0.0510-0.1010-0.0410-0.1010-0.4010-0.0610-注：重复性限为2.8S,.S,为重复性标准差3