建筑行业节能1NO.052023节能ENERGYCONSERVATION垂直单向流洁净室高架地板布置研究王妍（中国电子工程设计院有限公司，北京100142）摘要：为了探究垂直单向流洁净室高架地板最优布置规则，建立典型垂直单向流洁净室数值计算模型，以高架地板布置形式为影响因子，设置6种计算工况，通过现场实测验证模型的准确性。结果显示：洁净室内气流组织受高架地板布置影响，风机过滤机组（FFU）下方0.62m以下区域，不同布置形式下工作面最大气流偏移角相差10.9倍、速度不均匀度相差2.9倍。通过对比分析提出垂直单向流洁净室高架地板布置建议，为垂直单向流洁净室在设计和运维过程中的气流组织优化提供参考。关键词：垂直单向流洁净室；高架地板布置；气流偏移角；速度不均匀度中图分类号：TB126文献标识码：A文章编号：1004-7948（2023）05-0001-04doi：10.3969/j.issn.1004-7948.2023.05.001Researchonlayoutofraised-floorintheverticalunidirectionalairflowcleanroomWANGYanAbstract：Inordertoexploretheoptimallayoutrulesofraised-floorintheverticalunidirectionalairflowcleanroom,aCFDnumericalmodelofthetypicalverticalunidirectionalairflowcleanroomwasestablished.Sixcalculationconditionsweresetwithraised-floorlayoutformsastheinfluencefactors,whichwasvalidatedbytest.Theresultsshowthattheairdistributionisaffectedbytheraised-floorlayoutinthecleanroom.Intheareaof0.62mbelowtheFFU,withdifferentlayoutformsofraised-floor,themaximumairflowoffsetanglevariesby10.9timesandthevelocitynon-uniformityvariesby2.9timesintheworkingface.Throughcomparisonandanalysis,thelayoutsuggestionsofraised-floorintheverticalunidirectionalairflowcleanroomisproposed,whichprovidesareferencefortheoptimizationofairdistributioninthedesign,operationandmaintenanceoftheverticalunidirectionalairflowcleanroom.Keywords:verticalunidirectionalairflowcleanroom;layoutofraised-floor;airflowoffsetangle;velocitynon-uniformity引言随着电子制造技术的进步，器件尺寸缩小到纳米级，电子制造工对进入亚微米区域的粒子污染的敏感性增加，工艺需求对洁净环境提出了更高要求。垂直单向流洁净室依靠平行气流的“活塞”作用将污染物快速排出，为生产工艺提供“高洁净”甚至“超洁净”环境保障。气流的均匀性是垂直单向流污染物控制的重...
