第36卷第2期2023年2月传感技术学报CHINESEJOURNALOFSENSORSANDACTUATORSVol.36No.2Feb.2023收稿日期:2022-06-15修改日期:2022-09-01StructuralDesignofWirelessFlexiblePressureSensorBasedonDouble-LayerPlanarSpiralInductorFANTingbo*,MIAOJia(JiangsuInstituteofMedicalDeviceTesting,NanjingJiangsu210037,China)Abstract:State-of-the-artflexiblesensorshavebeenwidelystudiedinelectronicskin,intelligenttextile,flexiblerobot,etc.Mostsensorsneedtobeconnectedtorigidacquisitioncircuits,whichlimitstheflexibility,comfortandlightnessofthedevices.Aflexiblewirelesspassivepressuresensorbasedondouble-layerplanarspiralinductorsisreported.Thesensorcomposesofthreeflexiblelayers,i.e.,double-layerplanarspiralinductor(antennalayer),ferritefilmwithhighpermeabilityandelasticfabriclayer.Specially,thedouble-layerplanarspiralinductorlayerconsistsoftwoplanarcoilswithoppositerotationdirections,forminganinductance-capacitance(LC)resonatorwithlargeinductanceandcapacitance.Thepressure-dependentresonantfrequencyofthesensoriswirelesslydetectedthroughanelectromagneticallycoupledchargingcoil/receiver.Byinvestigatingthestructuraldesignoffourkindsofdouble-layerspiralinductorantennas,thesensorachievesthesensitivityofashighas0.11MHz/kPaandthedetectiondistanceupto18mm.Thewirelesspassivepressuresensorbasedondouble-layerplanarspiralinductorarchitecturebreaksthelimitationofwiredelectricalconnections,showingagreatapplicationpotentialinthefieldssuchasthenext-generationofhealthcaresystemsandintelligentrobotics.Keywords:flexiblepressuresensor;wirelesscommunication;planarspiralinductor;LCresonatorEEACC:7210;7230;7230Sdoi:10.3969/j.issn.1004-1699.2023.02.006基于双层平面螺旋电感的无线柔性压力传感器结构设计范庭波*,缪佳(江苏省医疗器械检验所,江苏南京210037)摘要:新型柔性传感器在电子皮肤、智能纺织、柔性机器人等领域得到了广泛的研究。目前多数传感器需要连接刚性的采集电路,这限制了设备柔软性、舒适性和轻盈度的提升。提出了一种基于双层平面螺旋电感的柔性无线无源压力传感器。该传感包含三层柔性层:双层平...