第45卷第1期压电与声光Vol.45No.12023年2月PIEZOELECTRICS&ACOUSTOOPTICSFeb.2023收稿日期:2022-08-19作者简介:赵雪梅(1969-),女,重庆市人,高级工程师,主要从事微声工艺技术研究。文章编号:1004-2474(2023)01-0001-05DOI:10.11977/j.issn.1004-2474.2023.01.001基于分层级联技术的梯形声表面波滤波器正向设计赵雪梅1,郑泽渔1,白涛1,贺贞1,谢晓1,谭瑞1,肖强1,2,陈正林1,2,马晋毅1(1.中国电子科技集团公司第二十六研究所,重庆400060;2.模拟集成电路国家重点实验室,重庆400060)摘要:针对任意复杂拓扑结构的梯形声表面波(SAW)滤波器的精确快速设计问题,基于声/电/磁多物理场耦合全波仿真平台,结合基因遗传优化算法和通用图形处理器(GPGPU)加速技术,利用有限元分层级联精确模型(HCT)代替COM模型进行SAW滤波器的设计与优化,计算速度和优化速度与COM模型相当。通过42°Y-XLiTaO3常规SAW滤波器的优化设计与研制,插入损耗为0.67dB,2dB相对带宽为3.85%,验证了该方法的有效性和可行性。关键词:SAW滤波器;全波仿真;分层级联;遗传算法中图分类号:TN65;TN713文献标志码:AForwardDesignofLadderSurfaceAcousticWaveFilterBasedonHierarchicalCascadingTechniqueZHAOXuemei1,ZHENGZeyu1,BAITao1,HEZhen1,XIEXiao1,TANRui1,XIAOQiang1,2,CHENZhenglin1,2,MAJinyi1(1.The26thInstituteofChinaElectronicsTechnologyGroupCorporation,Chongqing400060,China;2.ScienceandTechnologyonAnalogIntegratedCircuitLaboratory,Chongqing400060,China)Abstract:Inviewofaccurateandfastdesignofladdersurfaceacousticwave(SAW)filterwitharbitraryandcomplextopology,basedonacoustic/electrical/magneticmulti-physicalfieldcouplingfull-wavesimulationplatformandcombinedwithgeneticoptimizationalgorithmandgeneralgraphicsprocessor(GPGPU)accelerationtechnology,thehierarchicalcascadeexactmodel(HCT)isusedtoreplaceCOMmodelforthedesignandoptimizationofSAWfilter.ThecalculationandoptimizationspeedarecomparablewiththatofCOMmodel.Theoptimizeddesignandde-velopmentof42°Y-XLiTaO3conventionalSAWfilterwithinsertionlossof0.67dBand2dBfractionalbandwidthof3.85%verifiestheeffectivenessandfeasibilitytheproposedmethod.Keywords:SAWdevice;full-wavesimulation;hierarchicalcascade;geneticalgorithm0引言梯形声表面波(SAW)滤波器因低插损、易制备、低...
