第36卷第2期2023年2月传感技术学报CHINESEJOUＲNALOFSENSOＲSANDACTUATOＲSVol.36No.2Feb．2023项目来源:国家自然科学基金委员会青年科学基金项目(62104211)收稿日期:2022－04－09修改日期:2022－05－27DesignofaMEMSStress-IsolationStructureBasedontheStandingWaveCharacteristicsofConcentricＲing*DONGLeinuo，MAZhipeng*，CHENJinliang(SchoolofAeronauticsandAstronautics，ZhejiangUniversity，HangzhouZhejiang310027，China)Abstract:TheperformanceofMEMSsensorssuchasaccelerometerishighdependentonthefabricationofthemechanicalcomponentandthereadoutcircuit，thepackagingprocessandsoon．Inparticular，thethermalstresseffectofthemechanicalstructureofMEMSsensorsisdominant．Toreducethethermalstress，anovelstress-isolationstructureutilizingthestandingwavecharacteristicsofconcen-tricringsisproposed．Thethermalstressresultedfromtheanchorscanbeabsorbedbytheconcentric-ringstructureandthusisolatedfromthesensitivestructure．Basedonfiniteelementmethod(FEM)，thethermaldeformationisevaluatedfordifferentconcentric-ringstructures．Theeffectsofboththeresidualstressarisingfromtheanodicbondingprocessandthethermalstressduetotemperaturechangeontheresonantfrequencyandnormal/shearstressoftheaccelerometerarerevealed．Theefficiencyofstressisolationisesti-matedfordifferentconcentric-ringstructuraldesigns．Itshowsthattheefficienciesofthenormalandshearstressisolationexceed99．98%and99．53%respectively．Asaresult，theconcentric-ringstructurewithoptimizedstructuraldimensionhassuperiorstress-iso-lationperformanceovertheconventionalframe-typestructure．Keywords:MEMS;stressisolation;finiteelementanalysis;micro-accelerometer;thermalstressEEACC:2575;7120doi:10．3969/j．issn．1004－1699．2023．02．001基于多层嵌套环驻波特性的MEMS应力隔离结构设计*董磊锘，马志鹏*，陈瑾亮(浙江大学航空航天学院，浙江杭州310027)摘要:MEMS加速度计等传感器检测精度受机械元件加工、电路制作、封装工艺等方面影响，其中机械热应力的影响尤为显著。为降低热应力，提出了一种基于多层嵌套环驻波特性的应力隔离结构设计，利用嵌套环的驻波振动特性，通过多层嵌套环逐级吸收传递...
