=================================DOI:10.13290/j.cnki.bdtjs.2023.03.003March2023SemiconductorTechnologyVol.48No.3199一种3D打印的高次模带通滤波扭波导王文军1,张翊2,徐军2(1.中国电子科技集团公司第十三研究所,石家庄050051;2.电子科技大学物理学院,成都611730)摘要:为了满足微波电路小型化、集成化的需求,提出了一种基于高次模的滤波扭波导。该滤波扭波导能同时实现带通滤波响应和极化旋转,其谐振单元采用基于TE102模的椭圆柱谐振器,获得了更高的无载Q值,降低了对加工误差的敏感度。考虑到该扭波导不规则的几何结构,采用非金属3D打印技术制备并将其表面金属化,与对应的铜制元件相比,该元件质量显著减轻。设计的滤波扭波导的中心频率为15GHz,通带宽度为300MHz,回波损耗为20dB,测试和仿真结果具有较好的一致性。该滤波扭波导可有效减小元件体积,减小多器件级联的额外损耗。关键词:滤波器;扭波导;3D打印;一体制造;高次模中图分类号:TN62;TN713.5文献标识码:A文章编号:1003-353X(2023)03-0199-05A3DPrintedHigh-OrderModeTwistwithBandpassFilteringResponseWangWenjun1,ZhangYi2,XuJun2(1.The13thResearchInstitute,CETC,Shijiazhuang050051,China;2.SchoolofPhysics,UniversityofElectronicScienceandTechnologyofChina,Chengdu611730,China)Abstract:Fortherequirementofminiaturizationandintegrationofmicrowavecircuits,afilteringtwistbasedonhighordermodewasproposed.Thefilteringtwistprovidesthebandpassfilteringresponseandpolarizationrotationsimultaneously.EllipticalcylinderresonatorsoperatinginTE102modewasem-ployedtoobtainahigherunloadqualityfactorandabetterfabricationtolerance.Consideringthegeo-metriccomplexibility,thetwistwasfabricatedbyusingnon-metallic3Dprintingfollowedbymetallizationofthesurface.Comparedwithacopperone,the3Dprintedfilteringtwistissubstantiallylighter.Thefilteringtwistwithacenterfrequencyof15GHz,abandwidthof300MHzandareturnlossof20dBwasdesigned.Themeasurementandsimulationresultshavegoodconsistency.Thedesignofthefilteringtwistreducesthesizeofthecomponentandeliminatesadditionallossescausedbymultiplecascadeddevicesarchitecture.Keywords:filter;twist;3Dprinting;integratedmanufacturing;high-ord...