IEC_TS_61994-4-4-2018.pdf

IEC TS 61994-4-4 Edition 3.0 2018-11 TECHNICAL SPECIFICATION Piezoelectric,dielectric and electrostatic devices and associated materials for frequency control,selection and detection Glossary Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices IEC TS 61994-4-4:2018-11(en)THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2018 IEC,Geneva,Switzerland All rights reserved.Unless otherwise specified,no part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical,including photocopying and microfilm,without permission in writing from either IEC or IECs member National Committee in the country of the requester.If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication,please contact the address below or your local IEC member National Committee for further information.IEC Central Office Tel.:+41 22 919 02 11 3,rue de Varemb infoiec.ch CH-1211 Geneva 20 www.iec.ch Switzerland About the IEC The International Electrotechnical Commission(IEC)is the leading global organization that prepares and publishes International Standards for all electrical,electronic and related technologies.About IEC publications The technical content of IEC publications is kept under constant review by the IEC.Please make sure that you have the latest edition,a corrigenda or an amendment might have been published.IEC Catalogue-webstore.iec.ch/catalogue The stand-alone application for consulting the entire bibliographical information on IEC International Standards,Technical Specifications,Technical Reports and other documents.Available for PC,Mac OS,Android Tablets and iPad.IEC publications search-webstore.iec.ch/advsearchform The advanced search enables to find IEC publications by a variety of criteria(reference number,text,technical committee,).It also gives information on projects,replaced and withdrawn publications.IEC Just Published-webstore.iec.ch/justpublished Stay up to date on all new IEC publications.Just Published details all new publications released.Available online and also once a month by email.Electropedia-www.electropedia.org The worlds leading online dictionary of electronic and electrical terms containing 21 000 terms and definitions in English and French,with equivalent terms in 16 additional languages.Also known as the International Electrotechnical Vocabulary(IEV)online.IEC Glossary-std.iec.ch/glossary 67 000 electrotechnical terminology entries in English and French extracted from the Terms and Definitions clause of IEC publications issued since 2002.Some entries have been collected from earlier publications of IEC TC 37,77,86 and CISPR.IEC Customer Service Centre-webstore.iec.ch/csc If you wish to give us your feedback on this publication or need further assistance,please contact the Customer Service Centre:salesiec.ch.IEC TS 61994-4-4 Edition 3.0 2018-11 TECHNICAL SPECIFICATION Piezoelectric,dielectric and electrostatic devices and associated materials for frequency control,selection and detection Glossary Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 01.040.31;31.140 ISBN 978-2-8322-6178-1 Registered trademark of the International Electrotechnical Commission Warning!Make sure that you obtained this publication from an authorized distributor.2 IEC TS 61994-4-4:2018 IEC 2018 CONTENTS FOREWORD.3 1 Scope.5 2 Normative references.5 3 There are no normative references in this document.Terms and definitions.5 3.1 Single crystals for SAW wafer.5 3.2 Terms and definitions related to LN and LT crystals.6 3.3 Terms and definitions related to all crystals.7 3.4 Flatness.7 3.5 Definitions of appearance defects.10 3.6 Other terms and definitions.11 Bibliography.14 Figure 1 Example of site distribution for LTV measurement.7 Figure 2 LTV value of each site.8 Figure 3 Schematic diagram of Sori.9 Figure 4 Wafer sketch and measurement points for TV5 determination.9 Figure 5 Schematic diagram of TTV.10 Figure 6 Schematic diagram of warp.10 Table 1 Description of wafer orientations.12 IEC TS 61994-4-4:2018 IEC 2018 3 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ PIEZOELECTRIC,DIELECTRIC AND ELECTROSTATIC DEVICES AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,SELECTION AND DETECTION GLOSSARY Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices FOREWORD 1)The International Electrotechnical Commission(IEC)is a worldwide organization for standardization comprising all national electrotechnical committees(IEC National Committees).The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields.To this end and in addition to other activities,IEC publishes International Standards,Technical Specifications,Technical Reports,Publicly Available Specifications(PAS)and Guides(hereafter referred to as“IE