IEC_TS_62622-2012.pdf

IEC/TS 62622 Edition 1.0 2012-10 TECHNICAL SPECIFICATION Nanotechnologies Description,measurement and dimensional quality parameters of artificial gratings IEC/TS 62622:2012(E)Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2012 IEC,Geneva,Switzerland All rights reserved.Unless otherwise specified,no part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical,including photocopying and microfilm,without permission in writing from either IEC or IECs member National Committee in the country of the requester.If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication,please contact the address below or your local IEC member National Committee for further information.IEC Central Office Tel.:+41 22 919 02 11 3,rue de Varemb Fax:+41 22 919 03 00 CH-1211 Geneva 20 infoiec.ch Switzerland www.iec.ch About the IEC The International Electrotechnical Commission(IEC)is the leading global organization that prepares and publishes International Standards for all electrical,electronic and related technologies.About IEC publications The technical content of IEC publications is kept under constant review by the IEC.Please make sure that you have the latest edition,a corrigenda or an amendment might have been published.Useful links:IEC publications search-www.iec.ch/searchpub The advanced search enables you to find IEC publications by a variety of criteria(reference number,text,technical committee,).It also gives information on projects,replaced and withdrawn publications.IEC Just Published-webstore.iec.ch/justpublished Stay up to date on all new IEC publications.Just Published details all new publications released.Available on-line and also once a month by email.Electropedia-www.electropedia.org The worlds leading online dictionary of electronic and electrical terms containing more than 30 000 terms and definitions in English and French,with equivalent terms in additional languages.Also known as the International Electrotechnical Vocabulary(IEV)on-line.Customer Service Centre-webstore.iec.ch/csc If you wish to give us your feedback on this publication or need further assistance,please contact the Customer Service Centre:csciec.ch.Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.IEC/TS 62622 Edition 1.0 2012-10 TECHNICAL SPECIFICATION Nanotechnologies Description,measurement and dimensional quality parameters of artificial gratings INTERNATIONAL ELECTROTECHNICAL COMMISSION W ICS 07.030 PRICE CODE ISBN 978-2-83220-394-1 Warning!Make sure that you obtained this publication from an authorized distributor.Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.2 TS 62622 IEC:2012(E)CONTENTS FOREWORD.4 INTRODUCTION.6 1 Scope.7 2 Normative references.7 3 Terms and definitions.7 3.1 Basic terms.7 3.2 Grating terms.10 3.3 Grating types.11 3.4 Grating quality parameter terms.14 3.5 Measurement method categories for grating characterization.17 4 Symbols and abbreviated terms.18 5 Grating calibration and quality characterization methods.18 5.1 Overview.18 5.2 Global methods.18 5.3 Local methods.19 5.4 Hybrid methods.20 5.5 Comparison of methods.20 5.6 Other deviations of grating features.21 5.6.1 General.21 5.6.2 Out of axis deviations.21 5.6.3 Out of plane deviations.22 5.6.4 Other feature deviations.22 5.7 Filter algorithms for grating quality characterization.23 6 Reporting of grating characterization results.23 6.1 General.23 6.2 Grating specifications.24 6.3 Calibration procedure.24 6.4 Grating quality parameters.24 Annex A(informative)Background information and examples.25 Annex B(informative)Bravais lattices.34 Bibliography.38 Figure 1 Example of a trapezoidal line feature on a substrate.8 Figure 2 Examples of feature patterns.9 Figure 3 Examples of 1D line gratings.12 Figure 4 Example of 2D gratings.13 Figure A.1 Result of a calibration of a 280 mm length encoder system which was used as a transfer standard in an international comparison 31.27 Figure A.2 Filtered(linear profile Spline filter with c=25 mm)results of Figure A.1.28 Figure A.3 Calibration of a 1D grating by a metrological SEM.30 Figure A.4 Calibration of pitch and straightness deviations on a 2D grating by a metrological SEM.31 Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.TS 62622 IEC:2012(E)3 Figure A.5 Results of an int