IEC_IEEE_62659-2015.pdf

IEC/IEEE 62659 Edition 1.0 2015-09 INTERNA TIONAL STA NDA RD Nanomanufacturing Large scale manufacturing for nanoelectronics IEC/IEEE 62659:2015-09(en)Copyright International Electrotechnical Commission THIS PUBLICA TION IS COPYRIGHT PROTECTED Copyright 2015 IEC,Geneva,Switzerland Copyright 2015 IEEE All r ights reserved.Unless other wise specified,no part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical,including photocopying and microfilm,without permission in writing being secured.Requests for per mission to r eproduce should be addressed to either IEC at the address below or IECs member National Committee in the country of the requester or fr om IEEE.IEC Centr al Office Institute of Electrical and Electronics Engineers,Inc.3,rue de Varemb 3 Par k Avenue CH-1211 Geneva 20 New Yor k,NY 10016-5997 Switzerland United States of America Tel.:+41 22 919 02 11 stds.iprieee.org Fax:+41 22 919 03 00 www.ieee.org infoiec.ch www.iec.ch About t he IEC The International Electr otechnical Commission(IEC)is the leading global organization that prepar es and publishes Inter national Standards for all electr ical,electronic and related technologies.About t he IEEE IEEE is the worlds largest professional association dedicated to advancing technological innovation and excellence for the benefit of humanity.IEEE and its member s inspire a global community through its highly cited publications,conferences,technology standar ds,and professional and educational activities.About IEC/IEEE publications The technical content of IEC/IEEE publications is kept under constant r eview by the IEC and IEEE.Please make sure that you have the latest edition,a cor rigendum or an amendment might have been published.IEC Cat alogue-webstore.iec.ch/cat alogue The stand-alone application for consulting the entire bibliographical information on IEC International Standards,Technical Specifications,Technical Reports and other documents.A vailable for PC,Mac OS,A ndroid Tablets and iPad.IEC publications search-w w w.iec.ch/searchpub The adv anced search enables to find IEC publications by a variety of criteria(reference number,text,technical committee,).It also giv es information on projec ts,replaced and withdrawn publications.IEC Just Published-webstore.iec.ch/justpublished Stay up to date on all new IEC publications.Just Published details all new publications released.Av ailable online and also once a month by email.Elect ropedia-w w w.elect ropedia.org The worlds leading online dic tionary of electronic and electrical terms containing more than 30 000 terms and definitions in English and French,with equiv alent terms in 15 additional languages.Also known as the International Elec trotechnical Vocabulary (IEV)online.IEC Glossar y-st d.iec.ch/glossar y More than 60 000 elec trotechnic al terminology entries in English and French extracted from the Terms and Definitions clause of IEC publications issued since 2002.Some entries hav e been collec ted from earlier publications of IEC TC 37,77,86 and CISPR.IEC Customer Serv ice Centre-webstore.iec.ch/csc If y ou wish to giv e us y our feedback on this publication or need further assistance,please contac t the Customer Serv ice Centre:csciec.ch.Copyright International Electrotechnical Commission IEC/IEEE 62659 Edit ion 1.0 2015-09 INTER NA TIONAL STA NDA R D Nanomanufacturing Large scale manufacturing for nanoelectronics INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 07.030;25.020 ISBN 978-2-8322-2915-6 Warning!Make sure that you obtained this publication from an authorized distributor.R egist er ed tr ademar k of t he Int er national Electr ot echnical Commission Copyright International Electrotechnical Commission 2 IEC/IEEE 62659:2015 IEC/IEEE 2015 CONTENTS FOREWORD.3 INTRODUCTION.5 1 Scope.6 2 Normative references.6 3 Terms and definitions.6 4 Abbreviations.8 5 Nanomaterials incorporation into electronics fabrication.9 5.1 General.9 5.2 Raw materials acquisition.10 5.3 Materials processing.11 5.4 Design.11 5.5 Fabrication.11 5.6 Test.11 5.7 End-use.11 6 Safety and environmental issues.11 Bibliography.12 Figure 1 Relationship between bottom-up,top-down and hybrid device fabrication processes for nanoelectronics over length scales.9 Table 1 Bottom-up process for nanoelectronics.9 Table 2 Top-down process for nanoelectronics.9 Table 3 Comparison of CMOS processes with exemplary CNT electronics process.10 Copyright International Electrotechnical Commission IEC/IEEE 62659:2015 3 IEC/IEEE 2015 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ NANOMANUFACTURING LARGE SCALE MANUFACTURING FOR NANOELECTRONICS FOREWORD 1)The International Electrotechnical Commission(IEC)is a worldwide organization for standardization comprising all national electrotechnical committees(IEC National Committees).The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields.To this end and in addition to