IEC_60747-16-10-2004.pdf

INTERNATIONALSTANDARD IEC60747-16-10QC 210021First edition2004-07Semiconductor devices Part 16-10:Technology Approval Schedule(TAS)for monolithic microwave integrated circuits Reference number IEC 60747-16-10:2004(E)LICENSED TO MECON Limited.-RANCHI/BANGALOREFOR INTERNAL USE AT THIS LOCATION ONLY,SUPPLIED BY BOOK SUPPLY BUREAU.Publication numbering As from 1 January 1997 all IEC publications are issued with a designation in the 60000 series.For example,IEC 34-1 is now referred to as IEC 60034-1.Consolidated editions The IEC is now publishing consolidated versions of its publications.For example,edition numbers 1.0,1.1 and 1.2 refer,respectively,to the base publication,the base publication incorporating amendment 1 and the base publication incorporating amendments 1 and 2.Further information on IEC publications The technical content of IEC publications is kept under constant review by the IEC,thus ensuring that the content reflects current technology.Information relating to this publication,including its validity,is available in the IEC Catalogue of publications(see below)in addition to new editions,amendments and corrigenda.Information on the subjects under consideration and work in progress undertaken by the technical committee which has prepared this publication,as well as the list of publications issued,is also available from the following:IEC Web Site(www.iec.ch)Catalogue of IEC publications The on-line catalogue on the IEC web site(www.iec.ch/searchpub)enables you to search by a variety of criteria including text searches,technical committees and date of publication.On-line information is also available on recently issued publications,withdrawn and replaced publications,as well as corrigenda.IEC Just Published This summary of recently issued publications(www.iec.ch/online_news/justpub)is also available by email.Please contact the Customer Service Centre(see below)for further information.Customer Service Centre If you have any questions regarding this publication or need further assistance,please contact the Customer Service Centre:Email:custserviec.ch Tel:+41 22 919 02 11 Fax:+41 22 919 03 00 LICENSED TO MECON Limited.-RANCHI/BANGALOREFOR INTERNAL USE AT THIS LOCATION ONLY,SUPPLIED BY BOOK SUPPLY BUREAU.INTERNATIONALSTANDARD IEC60747-16-10QC 210021First edition2004-07Semiconductor devices Part 16-10:Technology Approval Schedule(TAS)for monolithic microwave integrated circuits IEC 2004 Copyright-all rights reservedNo part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical,including photocopying and microfilm,without permission in writing from the publisher.International Electrotechnical Commission,3,rue de Varemb,PO Box 131,CH-1211 Geneva 20,SwitzerlandTelephone:+41 22 919 02 11 Telefax:+41 22 919 03 00 E-mail:inmailiec.ch Web:www.iec.chXAFor price,see current cataloguePRICE CODE Commission Electrotechnique InternationaleInternational Electrotechnical Commission?LICENSED TO MECON Limited.-RANCHI/BANGALOREFOR INTERNAL USE AT THIS LOCATION ONLY,SUPPLIED BY BOOK SUPPLY BUREAU.2 60747-16-10 IEC:2004(E)CONTENTS FOREWORD.4Foreword to this particular Technology Approval Schedule(TAS).7Organizations responsible for preparing the present TAS.7Preface.7INTRODUCTION.81General.91.1Scope.91.2Normative documents.91.3Units,symbols and terminology.101.4Standard and preferred values.101.5Definitions.102Definition of the component technology.122.1Scope.122.2Description of activities and flow charts.132.3Technical abstract.132.4Requirements for control of subcontractors.163Component design of MMICs.183.1Scope.183.2Description of activities and flow charts.183.3Interfaces.193.4Validations and control of the processes.214Mask manufacture.234.1Scope.234.2Description of activities and flow charts.234.3Validation and control of the processes.234.4Subcontractors,vendors and internal suppliers.235Wafer fabrication of MMICs.235.1Scope.235.2Description of activities and flow charts.245.3Equipment.265.4Materials.265.5Re-work.265.6Validation methods and control of the processes.275.7Interrelationship.286Wafer probing of MMICs.306.1Scope.306.2Description of activities and flow charts.306.3Equipment.306.4Test procedures.306.5Interrelationship.307Back-side process for bare chip delivery.327.1Scope.327.2Description of activity and flow charts.327.3Equipment.337.4Materials.33LICENSED TO MECON Limited.-RANCHI/BANGALOREFOR INTERNAL USE AT THIS LOCATION ONLY,SUPPLIED BY BOOK SUPPLY BUREAU.60747-16-10 IEC:2004(E)3 7.5Validation methods and control of the processes.337.6Interrelationship.337.7Validity of release.348Assembly of MMICs.368.1Scope.368.2Description of activities and flow charts.368.3Materials,inspection and handling.378.4Equipment.378.5Re-work.378.6Validation and control of the processes.378.7Interrelationships.389Testing of MMICs.409.1Scope.409.2Description of activities and flow charts.409.3Equipment.409.4Test procedures.419.5Interfaces.429.6Validation and control of the proces