（总第297期）电子工业专用设备EquipmentforElectronicProductsManufacturingEEPMDec．2022收稿日期：2022-12-01基于激光追踪仪的运动轴性能测试与分析赵东雷，关宏武，王浩楠，郎平，刘颖(中国电子科技集团公司第四十五研究所，北京100176)摘要：针对现有运动轴性能测试方法的缺点，提出了基于激光追踪仪的测量方法，其核心思想是将运动轴性能测试转化为数学问题。首先选用高精度直线模组构造垂向运动测试装置，并明确了直线模组的必备选型指标；其次以运动直线度、运动姿态和重复定位精度为例，系统介绍了其测量原理、测量流程和数据处理方法；最后通过对比实验完成了测试方法的可行性分析，结果表明激光追踪仪反射镜测试方案测量精度高、更符合实际。依托激光追踪仪可实现集成过程与测量环节的有机统一，为提升产品性能和精度提供了可靠保障。关键词：运动轴；激光追踪仪；直线度；运动姿态；重复定位精度中图分类号：TN307文献标志码：B文章编号：1004-4507(2022)06-0044-06PerformanceTestandAnalysisofMovingAxisBasedonLaserTrackerZHAODonglei，GUANHongwu，WANGHaonan，LANGPing，LIUYing(The45thResearchInstituteofCETC，Beijing100176，China)Abstract:Aimingatthedisadvantagesoftheexistingmethodsformeasuringperformanceofmovingaxis，ameasurementmethodbasedonLaserTrackerisproposed.Itscoreideaistotransformtheperformancetestofmovingaxisintoamathematicalproblem.Firstly，ahighprecisionlinearmoduleisselectedtoconstructtheverticalmotiontestingdevice，andthenecessaryselectionindexofthelinearmoduleisdefined；Secondly，takingmotionstraightness，motionattitudeandrepetitivepositioningaccuracyasexample，themeasurementprinciple，measurementprocessanddataprocessingmethodaresystematicallyintroduced.Finally，feasibilityanalysisofthetestmethodiscompletedthroughcomparativeexperiments，theresultsshowthatmeasuringschemeofLaserTrackermirrorismoreaccurateandpractical.RelyingontheLaserTracker，theintegrationprocessandmeasurementlinkcanbeorganicallyunified，providingareliableguaranteeforimprovingproductperformanceandaccuracy.测试测量技术与设备44（总第297期）电子工业专用设备EquipmentforElectronicProductsManufacturingEEPMDec．2022精密半导体设备内部结构复杂、体积大、工...
