=================================DOI:10．13290/j．cnki．bdtjs．2023．01．00848半导体技术第48卷第1期2023年1月基于GaAsPHEMT工艺的超宽带多通道开关滤波器组MMIC王胜福，王洋，李丽，于江涛，张仕强，李宏军(中国电子科技集团公司第十三研究所，石家庄050051)摘要:基于0.25μmGaAs赝配高电子迁移率晶体管(PHEMT)工艺，研制了一款超宽带7路开关滤波器组单片微波集成电路(MMIC)芯片。芯片内集成了开关、驱动电路和带通滤波器，实现了开关滤波功能。开关采用反射式串－并联混合结构;译码器和驱动电路控制某一支路开关的导通或关断;带通滤波器由集总电感和电容组成。该开关滤波器组芯片通带频率覆盖0.8～18GHz。探针测试结果表明，开关滤波器组芯片各个支路的中心插入损耗均小于8.5dB，通带内回波损耗小于10dB，典型带外衰减大于40dB。为后续研发尺寸更小、性能更优的开关滤波器组提供了参考。关键词:GaAs赝配高电子迁移率晶体管(PHEMT);超宽带;多通道滤波器;带通滤波器;开关滤波器组;单片微波集成电路(MMIC)中图分类号:TN713文献标识码:A文章编号:1003－353X(2023)01－0048－06AnUltra-WidebandMulti-ChannelSwitchingFilterBankMMICBasedonGaAsPHEMTTechnologyWangShengfu，WangYang，LiLi，YuJiangtao，ZhangShiqiang，LiHongjun(The13thＲesearchInstitute，CETC，Shijiazhuang050051，China)Abstract:Basedon0.25μmGaAspseudomorphichighelectronmobilitytransistor(PHEMT)technology，anultra-wideband7-channelswitchingfilterbankmonolithicmicrowaveintegratedcircuit(MMIC)chipwasdesigned．Theswitches，drivercircuitsandband-passfilterswereintegratedinsidethechiptorealizethefunctionofswitchingfiltering．Ｒeflectiveseries-shunthybridstructurewereadoptedtodesigntheswitches．Theonoroffofaswitchbranchwascontrolledbydecoderanddriver．Theband-passfilterswerecomposedoflumpedinductanceandcapacitance．Thepassbandoftheswitchingfilterbankchipcovers0.8－18GHz．Theprobetestresultsshowthattheinsertionlossatcenterfrequencyofeachchannelislessthan8.5dB，thein-bandreturnlossislessthan10dB，thetypicalout-of-bandat-tenuationisgreaterthan40dB．Itprovidesreferenceforfurtherresearchanddevelopmentofswitchingfilterbankswithsmallersizeandbetterperformance．Keywords:GaAspseudomorphichighelectronm...
