火工品INITIATORS&PYROTECHNICS文章编号：1003-1480（2023）01-0016-06Cu/Ni复合爆炸箔的制备及其电爆性能研究陈航，唐书缘，刘佳兴，周全，代波，任勇（西南科技大学环境友好能源材料国家重点实验室，四川绵阳，621010）摘要：采用磁控溅射、光刻及湿法刻蚀等工艺制备了厚度为3μm的Cu爆炸箔、Ni爆炸箔以及Cu/Ni复合爆炸箔，采用XRD、SEM及EDS对样品进行物相及截面形貌表征，并对爆炸箔电阻及其电爆性能进行测试。结果表明：随着Ni元素的增加，复合爆炸箔电阻逐渐增大；在1000V充电电压下，Cu膜厚度为300nm、Ni膜厚度为200nm、调制周期为6的Cu/Ni复合爆炸箔（Cu300Ni200)6的爆发电流是Cu爆炸箔的2.33倍，是Ni爆炸箔的1.56倍；其爆发功率是Cu爆炸箔的3.81倍，是Ni爆炸箔的1.45倍；其能量利用率为30.96%，是Cu爆炸箔的1.29倍，是Ni爆炸箔的1.28倍。关键词：爆炸箔；Cu/Ni；电爆性能；磁控溅射中图分类号：TJ450.3文献标识码：ADOI：10.3969/j.issn.1003-1480.2023.01.004PreparationandStudyonElectricalPerformanceofCu/NiExplodingFoilCHENHang，TANGShu-yuan，LIUJia-xing，ZHOUQuan，DAIBo，RENYong(StateKeyLaboratoryofEnvironment-friendlyEnergyMaterials,SouthwestUniversityofScienceandTechnology,Mianyang,621010)Abstract：TheCu,NiandCu/Niexplodingfoilswith3μmthicknesswerepreparedbymagnetronsputtering,photolithographyandwetetching.XRD,SEMandEDSwereusedtocharacterizethephaseandcross-sectionalmorphologyofthesamples,theresistanceandtheelectroexplosiveperformanceoftheexplodingfoilsweretested.TheresultsshowthatwiththeincreaseofNielement,theresistanceoftheexplodingfoilgraduallyincrease.Under1000Vchargingvoltage,theexplosioncurrentofthe(Cu300Ni200)6sample,whichhas300nmthicknessofCufilmand200nmthicknessofNifilmasaperiodandatotalof6periods,is2.33timesthatoftheCuexplodingfoil,1.56timesthatoftheNiexplodingfoil,andtheexplosionpoweris3.81timesthatofCuexplosionfoiland1.45timesthatofNiexplosionfoil.Theenergyutilizationrateofthe(Cu300Ni200)6sampleis30.96%,whichis1.29timesthatoftheCuexplosionfoiland1.28timesthatoftheNiexplosionfoil.Keywords：Explodingfoil；Cu/Ni；Electroexplosiveperformance；Magnetronsputtering爆炸箔起爆系统因其安全性好、环境适应性强、作用时间短...
