第38卷第2期无机材料学报Vol.38No.22023年2月JournalofInorganicMaterialsFeb.,2023Receiveddate:2022-05-27;Reviseddate:2022-06-04;Publishedonline:2022-08-26Foundationitem:StrategicPriorityProgramoftheChineseAcademyofSciences(XDA25020313);NationalNaturalScienceFoundationofChina(61925508);ScienceandTechnologyCommissionofShanghaiMunicipality(20501110300,20511107400);CASProjectforYoungScientistsinBasicResearch(YSBR-024)Biography:WANGHuajin(1996–),male,Mastercandidate.E-mail:wanghuajin@shu.edu.cn王华进(1996–),男,硕士研究生.E-mail:wanghuajin@shu.edu.cnCorrespondingauthor:KOUHuamin,associateprofessor.E-mail:huaminkou@mail.sic.ac.cn;SULiangbi,professor.E-mail:suliangbi@mail.sic.ac.cn寇华敏,高级工程师.E-mail:huaminkou@mail.sic.ac.cn;苏良碧,研究员.E-mail:suliangbi@mail.sic.ac.cnArticleID:1000-324X(2023)02-0219-06DOI:10.15541/jim20220300IrradiationDamageofCaF2withDifferentYttriumConcentrationsunder193nmLaserWANGHuajin1,2,KOUHuamin2,WANGYongzhe2,JIANGDapeng2,ZHANGBo2,QIANXiaobo2,WANGJingya2,ZHULinling4,ZENGAijun4,YANGQiuhong1,SULiangbi2,3(1.SchoolofMaterialsScienceandEngineering,ShanghaiUniversity,Shanghai200444,China;2.StateKeyLaboratoryofHighPerformanceCeramicsandSuperfineMicrostructure,ShanghaiInstituteofCeramics,ChineseAcademyofSciences,Shanghai201899,China;3.CenterofMaterialsScienceandOptoelectronicsEngineering,UniversityofChineseAcademyofSciences,Beijing100049,China;4.ShanghaiInstituteofOpticsandFineMechanics,Shanghai201800,China)Abstract:RadiationresistanceofCaF2crystalisoneofthecriticalpropertiesintheapplicationofdeepultravioletlithography,butthedamageprocessunder193nmlaserirradiationisstillunclear.ThispaperreportsthedamagebehaviorofCaF2crystalsunder193nmlaserirradiationandthekeydefectfactorsaffectingthedamage.Throughthe193nmlaserirradiationexperiment,itisfoundthatthecrystaldamageismainlymanifestedastheradiation-inducedcolorcentersinsidethecrystalandtheradiation-induceddamagepitsonthesurface.Irradiation-inducedcolorcenterswereanalyzedbyUV-visiblespectrophotometer,andlin...
