_STP_1413-2001.pdf

STP 1413 Mechanical Properties of Structural Films Christopher L.Muhlstein and Stuart B.Brown,editors ASTM Stock Number:STP1413 ASTM 100 Barr Harbor Drive PO Box C700 West Conshohocken,PA 19428-2959 Printed in the U.S.A.Library of Congress Cataloging-in-Publication Data Mechanical properties of structural films/Christopher L.Muhlstein and Stuart B.Brown,editors.p.cm.-(STP;1413)ASTM Stock Number:STP1413.Includes bibliographical references and index.ISBN 0-8031-2889-4 1.Thin films-Mechanical properties-Congresses.I.Muhlstein,Christopher L.,1971-II.Brown,Stuart B.II1.American Society for Testing and Materials.IV.ASTM special technical publication;1413.TA418.9.T45 M43 2001 621.38152-dc21 2001053566 Copyright?9 2001 AMERICAN SOCIETY FOR TESTING AND MATERIALS,West Conshohocken,PA.All rights reserved.This material may not be reproduced or copied,in whole or in part,in any printed,mechanical,electronic,film,or other distribution and storage media,without the written consent of the publisher.Photocopy Rights Authorization to photocopy items for internal,personal,or educational classroom use,or the internal,personal,or educational classroom use of specific clients,is granted by the American Society for Testing and Materials(ASTM)provided that the appropriate fee is paid to the Copy-right Clearance Center,222 Rosewood Drive,Danvers,MA 01923;Tel:978-750-8400;online:http:/ Review Policy Each paper published in this volume was evaluated by two peer reviewers and at least one editor.The authors addressed all of the reviewers comments to the satisfaction of both the technical editor(s)and the ASTM Committee on Publications.The quality of the papers in this publication reflects not only the obvious efforts of the authors and the technical editor(s),but also the work of the peer reviewers.In keeping with long-standing publication practices,ASTM maintains the anonymity of the peer reviewers.The ASTM Committee on Publications acknowledges with appreciation their dedication and contribution of time and effort on behalf of ASTM.Printed in Bridgeport,NJ November 2001 Foreword This publication,Mechanical Properties of Structural Films,contains papers presented at the sym-posium of the same name held in Orlando,Florida,on 15-16 November 2000.The symposium was sponsored by ASTM Committee E08 on Fatigue and Fracture and by its Subcommittees E08.01 on Research and Education and E08.05 on Cyclic Deformation and Fatigue Crack Formation.The sym-posium chairman was Chris Muhlstein,University of California at Berkeley,and the symposium co-chairman was Stuart Brown,Exponent Failure Analysis Associates,Natick Massachusetts.Contents Overview.vii FRACTURE AND FATIGUE OF STRUCTURAL FILMS Surface Topology and Fatigue in Si MEMS Structures-s.M.ALLAMEH,B.GALLY,S.BROWN,AND W.O.SOBOYEJO.3 Cross Comparison of Direct Strength Testing Techniques on Polysilicon Films-D.A.LAVAN,T.TSUCHIYA,G.COLES,W.G.KNAUSS,1.CHASIOTIS,AND D.READ.16 Fatigue and Fracture in Membranes for MEMS Power Generation-D.F.BAHR,B.T.CROZIER,C.D.RICHARDS,AND R.F.RICHARDS.28 Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon:A Wafer Level Testing Approach-R.BALLARINI,H.rHN,N.TAYEBI,AND A.H.HEUER.37 Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin Film-g.TAKASHIMA,M.SHIMOJO,Y.HIGO,AND M.V.SWAIN.52 Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System-D.A.LAVAN,K.JACKSON,B.MCKENZIE,S.J.GLASS,T.A.FRIEDMANN,J.P.SULLIVAN,AND T.E.BUCHHEIT.62 Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film-K.TAKASHIMA,M.SHIMOJO,Y.HIGO,AND M.V.SWAIN.72 ELASTIC BEHAVIOR AND RESIDUAL STRESS IN THIN FILMS Integrated Platform for Testing MEMS Mechanical Properties at the Wafer Scale by the IMaP Methodology-M.P.DE BOER,N.F.SMITH,N.D.MASTERS,M.B.SINCLAIR,AND E.J.PRYPUTNIEWICZ.85 Influence of the Film Thickness on Texture,Residual Stresses and Cracking Behavior of PVD Tungsten Coatings Deposited on a Ductile Substrate-T.GANNE,G.FARGES,J.CREPIN,R.-M.PRADEILLES-DUVAL,AND A.ZAOUI.96 High Accuracy Measurement of Elastic Constants of Thin Films by Surface Brillouin Scattering-M.O.BEGHI,C.E.BOTTANI,AND R.PASTORELLI.109 Effect of Nitrogen Feedgas Addition on the Mechanical Properties of Nano-Structured Carbon Coatings-s.A.CATLEDGE AND Y.K.VOHRA.127 Characterization of the Youngs Modulus of CMOS Thin Films-N.HOSSAIN,J.W.JU,B.WARNEKE,AND K.S.J.PISTER.139 Derivation of Elastic Properties of Thin Films from Measured Acoustic Velocities-R.PASTORELLI,S.TARANTOLA,M.G.BEGHI,C.E.BOTTANI,AND A.SALTELLI.152 Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression-N.D.MASTERS,M.P.DE BOER,B.D.JENSEN,M.S.BAKER,AND D.KOESTER.168 vi CONTENTS TENSILE TESTING OF STRUCTURAL FILMS Mechanical Tests of Free-Standing Aluminum Microbeams for MEMS Application-P.ZHANG,H.-J.LEE,AND J.C.BRAVMAN.203 Tensile Testing of Thin Films Using Electrostatic Force Grip-T.TS