Designation:F979–86(Reapproved2003)StandardTestMethodforHermeticityofHybridMicrocircuitPackagesPriortoLidding1ThisstandardisissuedunderthefixeddesignationF979;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(e)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thehermeticintegrityofhybridmicrocircuitpackagesisanimportantmaterialorpartsacceptancerequirement.Determinationofthisparametershouldbemadebeforethehybridcircuitisassembledandsealedinsidethepackage.1.2Thistestmethodcoversatestforleaksinapackagethatisintendedtobehermeticallysealedafterhybridcircuitassembly.Varioustypesofhybridpackagesmaybetestedbythistestmethod.Thetestmethodisnondestructiveandthereforesuitablefor100%inspection.1.3Thisstandarddoesnotpurporttoaddressthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.2.ReferencedDocuments2.1ASTMStandards:2F78TestMethodforCalibrationofHeliumLeakDetectorsbyUseofSecondaryStandardsF134TestMethodsforDeterminingHermeticityofElec-tronDeviceswithaHeliumMassSpectrometerLeakDetector32.2FederalStandard:Fed.Std.No.209CleanRoomandWorkStationRequire-ments,ControlledEnvironment43.SummaryofMethod3.1Thespecimenpackageisplacedonanelastomersurfacewiththeinsidecavityofthepackagefacinganorificeintheelastomer.Thisorificeisanopeningtothevacuumsectionofamassspectrometerleakdetector.Heliumgas,towhichthemassspectrometerissensitive,isfloodedovertheoutsideofthepackage.Indicationofaleakisdetectedbysuitableinstrumentationonthemassspectrometer.4.SignificanceandUse4.1Hermeticitytestmethods,forexample,TestMethodsF134,dealwithsealedpackagesonlyanddonotapplydirectlytounsealedpackages.Thistestmethodismostapplicablefordeterminingthehermeticityofapackagebeforeithasbeensealedwithalidoracover.Pac...
