ASTM_F_50_-_12_2015.pdf

Designation:F5012(Reapproved 2015)Standard Practice forContinuous Sizing and Counting of Airborne Particles inDust-Controlled Areas and Clean Rooms Using InstrumentsCapable of Detecting Single Sub-Micrometre and LargerParticles1This standard is issued under the fixed designation F50;the number immediately following the designation indicates the year of originaladoption or,in the case of revision,the year of last revision.Anumber in parentheses indicates the year of last reapproval.Asuperscriptepsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This practice covers the determination of the particleconcentration,by number,and the size distribution of airborneparticles in dust-controlled areas and clean rooms,for particlesin the size range of approximately 0.01 to 5.0 m.Particleconcentrationsnotexceeding3.5 106particles/m3(100 000ft3)are covered for all particles equal to and largerthan the minimum size measured.1.2 This practice uses an airborne single particle countingdevice(SPC)whose operation is based on measuring the signalproduced by an individual particle passing through the sensingzone.The signal must be directly or indirectly related toparticle size.NOTE1The SPC type is not specified here.The SPC can be aconventional optical particle counter(OPC),an aerodynamic particlesizer,a condensation nucleus counter(CNC)operating in conjunction witha diffusion battery or differential mobility analyzer,or any other devicecapable of counting and sizing single particles in the size range of concernand of sampling in a cleanroom environment.1.3 Individuals performing tests in accordance with thispractice shall be trained in use of the SPC and shall understandits operation.1.4 Since the concentration and the particle size distributionof airborne particles are subject to continuous variations,thechoice of sampling probe configuration,locations and sam-pling times will affect sampling results.Further,the differencesin the physical measurement,electronic and sample handlingsystems between the various SPCs and the differences inphysical properties of the various particles being measured cancontribute to variations in the test results.These differencesshould be recognized and minimized by using a standardmethod of primary calibration and by minimizing variability ofsample acquisition procedures.1.5 Sample acquisition procedures and equipment may beselected for specific applications based on varying cleanroomclass levels.Firm requirements for these selections are beyondthe scope of this practice;however,sampling practices shall bestated that take into account potential spatial and statisticalvariations of suspended particles in clean rooms.NOTE2General references to cleanroom classifications follow Fed-eral Standard 209E,latest revision.Where airborne particles are to becharacterized in dust-controlled areas that do not meet theseclassifications,the latest revision of the pertinent specification for theseareas shall be used.1.6 The values stated in SI units are to be regarded as thestandard.The values given in parentheses are provided forinformation only and are not considered standard.1.7 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.For specific hazardsstatements,see Section 8.2.Referenced Documents2.1 ASTM Standards:2D1356 Terminology Relating to Sampling and Analysis ofAtmospheresF328 Practice for Calibration of an Airborne Particle Coun-ter Using Monodisperse Spherical Particles(Withdrawn2007)3F649 Practice for Secondary Calibration ofAirborne ParticleCounter Using Comparison Procedures(Withdrawn2007)3F658 Practice for Calibration of a Liquid-Borne ParticleCounter Using an Optical System Based Upon Light1This practice is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved Oct.1,2015.Published November 2015.Originallyapproved in 1965.Last previous edition approved in 2012 as F50 12.DOI:10.1520/F0050-12R15.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3The last approved version of this historical standard is referenced onwww.astm.org.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 Extinction(Withdrawn 2007)32.2 U.S.Federal Standard:Federal Standard No.209E,Clean Room and Work StationRequirements,Controlled Environment4,52.3 Other Documents:6ISO 14644-1 Cleanrooms and Associated ControlledEnvironments,Classification of air cleanlinessISO 14644-2 Cleanrooms and Associate