Designation:F398–92(Reapproved1997)StandardTestMethodforMajorityCarrierConcentrationinSemiconductorsbyMeasurementofWavenumberorWavelengthofthePlasmaResonanceMinimum1ThisstandardisissuedunderthefixeddesignationF398;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(e)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONAsoriginallypublished,thistestmethodwaswrittenforinfraredinstrumentswithoutputinunitsofwavelength.Calibrationdata,asincluded,werebasedoninfraredmeasurementsinunitsofwavelengthandonacombinationofconcentrationscalemethodsincludingHalleffect,neutronactivationanalysis,andfour-proberesistivity.Theselattermeasurementswereconverted,usingtheempiricaldataofIrvin,fromresistivityto“impurityconcentration.”Theresultofthisprocedureiscalibrationdatathatisamixtureofcarrierconcentrationandimpurityconcentrationvalues.Whilethedifferencesbetweenthemislargeonlyatveryhighconcentrations,therearevaluesintheoriginalcalibrationplotsforsilicon(Fig.A1.1andFig.A1.2)thatareabovecurrentlyacceptedsolid-solubilitylimitvalues.Commonpracticecurrentinfraredspectrophotometersistogiveoutputinunitsofwavenumbers(cm−1).Inordertorelatethistestmethodanditsoriginalcalibrationtocurrentinfraredunitswithoutintroducingnumericalerror(thecalibrationrelationisnotanalyticallyinvertibletowavenumbers),thedirectsubstitutionof10000/wavenumberforwavelengthisgivenintheanalysisequationandinthetablesofcoefficients.Thistestmethodisnotbelievedtohavewidecurrentuseinthesemiconductorindustry.However,becausethistestmethodmaybeusefulforsomeapplicationsandbecausethecalibrationdatacontainedhereinisbelievedtobeavailablenowhereelseinthearchivalliterature,thistestmethodisbeingretainedasastandard.1.Scope1.1Thistestmethodcoversdeterminationofthewavenum-beroftheplasmaresonanceminimumintheinfraredreflec-tanceofadopedsemiconductorspecimen,fromwhichthemajoritycar...
