_STP_572-1974.pdf

NATIONAL BUREAU OF STANDARDSThe National Bureau of Standards1 was established by an act of Congress March 3,1901.The Bureaus overall goal is to strengthen and advance the Nations science and technologyand facilitate their effective application for public benefit.To this end,the Bureau conductsresearch and provides:(1)a basis for the Nations physical measurement system,(2)scientificand technological services for industry and government,(3)a technical basis for equity in trade,and(4)technical services to promote public safety.The Bureau consists of the Institute forBasic Standards,the Institute for Materials Research,the Institute for Applied Technology,the Institute for Computer Sciences and Technology,and the Office for Information Programs.THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the UnitedStates of a complete and consistent system of physical measurement;coordinates that systemwith measurement systems of other nations;and furnishes essential services leading to accurateand uniform physical measurements throughout the Nations scientific community,industry,and commerce.The Institute consists of a Center for Radiation Research,an Office of Meas-urement Services and the following divisions:Applied Mathematics Electricity Mechanics Heat Optical Physics NuclearSciences-Applied Radiation 2 Quantum Electronics 3 Electromagnetics 3 Timeand Frequency 3 Laboratory Astrophysics*Cryogenics 3.THE INSTITUTE FOR APPLIED TECHNOLOGY provides technical services to promotethe use of available technology and to facilitate technological innovation in industry andGovernment;cooperates with public and private organizations leading to the development oftechnological standards(including mandatory safety standards),codes and methods of test;and provides technical advice and services to Government agencies upon request.The Instituteconsists of a Center for Building Technology and the following divisions and offices:Engineering and Product Standards Weights and Measures Invention and Innova-tion Product Evaluation Technology Electronic Technology Technical Analysis Measurement Engineering Structures,Materials,and Life Safety4 BuildingEnvironment 4 Technical Evaluation and Application 4 Fire Technology.THE INSTITUTE FOR COMPUTER SCIENCES AND TECHNOLOGY conducts researchand provides technical services designed to aid Government agencies in improving cost effec-tiveness in the conduct of their programs through the selection,acquisition,and effectiveutilization of automatic data processing equipment;and serves as the principal focus withinthe executive branch for the development of Federal standards for automatic data processingequipment,techniques,and computer languages.The Institute consists of the followingdivisions:Computer Services Systems and Software Computer Systems Engineering Informa-tion Technology.THE OFFICE FOR INFORMATION PROGRAMS promotes optimum dissemination andaccessibility of scientific information generated within NBS and other agencies of the FederalGovernment;promotes the development of the National Standard Reference Data System anda system of information analysis centers dealing with the broader aspects of the NationalMeasurement System;provides appropriate services to ensure that the NBS staff has optimumaccessibility to the scientific information of the world.The Office consists of the followingorganizational units:Office of Standard Reference Data Office of Information Activities Office of TechnicalPublications Library Office of International Relations.1 Headquarters and Laboratories at Gaithersburg,Maryland,unless otherwise noted;mailing addressWashington,D.C.20234.2 Part of the Center for Radiation Research.3 Located at Boulder,Colorado 80302.*Part of the Center for Building Technology.THE INSTITUTE FOR MATERIALS RESEARCH conducts materials research leading toimproved methods of measurement,standards and date on the properties of well-characterizedmaterials needed by industry,commerce,educational institutions,and Government;providesadvisory and research serrvices to other Government agencies;and develops,produces,anddistributes standard reference materials The Institute consists of the Office of StandardReference Materials and the following divisions:Analytical Chemistry Polymers Metallurgy Inorganic Materials ReactorRadiation Physical ChemistryCopyright by ASTM Intl(all rights reserved);Fri Jan 1 23:23:49 EST 2016Downloaded/printed byUniversity of Washington(University of Washington)pursuant to License Agreement.No further reproductions authorized.Semiconductor Measurement Technology:Spreading Resistance SymposiumProceedings of a SymposiumHeld at the National Bureau of StandardsGaithersburg,MarylandJune 13-14,1974James R.Ehrstein,EditorElectronic Technology DivisionInstitute for Applied TechnologyNational Bureau of StandardsWashington,B.C.20234Under the Sponsorship ofCommittee F-l of theAmerican Society for Testing and MaterialsandThe National Bureau of StandardsU.S.DEPARTMENT OF C