Designation:F1373−93(Reapproved2012)StandardTestMethodforDeterminationofCycleLifeofAutomaticValvesforGasDistributionSystemComponents1ThisstandardisissuedunderthefixeddesignationF1373;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONSemiconductorcleanroomsareservicedbyhigh-puritygasdistributionsystems.Thistestmethodpresentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredforuseinsuchsystems.1.Scope1.1Thistestmethodcoversthetestingofautomaticvalvesforcyclelifeutilizingstatic,no-flowconditions.Thisno-flowconditionisfelttobearealistictesttodeterminethevalve’scyclelife.1.2Thistestmethodappliestoautomaticallyoperatedvalves.Itisintendedtomeasurethecyclelifeofthevalveitselfincludingtheseatandbodysealing.Itdoesnotincludecycletestingoftheactuator.Testingmustincludebothpressuretestingandheliumleaktestingandmustincludevacuumtestconditionswhenappropriate.Thistestmethodmaybeappliedtoabroadrangeofvalvesizes.1.3Limitations:1.3.1Thistestisnotdesignedtoevaluatetheperformanceoftheactuator.Thistestmethodaddressesthegassystemcontaminationaspectsofthevalveperformance,thatis,seatandbodyleakageanddiaphragmorbellowsfailure.Iftheactuatorfailsduringtheevaluation,thevalveisdeemedasafailure.1.3.2Whiletherequirementsofavalve’sperformancemightincludeitemssuchasparticulategenerationlevels,thistestmethodonlyattemptstoevaluatecyclelifeandperfor-mancedegradationastheyrelatetotheabilityofthevalvetooperateandshutoffflow.1.3.3Thistestmethodiswrittenwiththeassumptionthattheoperatorunderstandstheuseoftheapparatusatalevelequivalenttosixmonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itisther...
