Designation:F1188–00StandardTestMethodforInterstitialAtomicOxygenContentofSiliconbyInfraredAbsorption1ThisstandardisissuedunderthefixeddesignationF1188;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(e)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thistestmethodcoversthedeterminationoftheinter-stitialoxygencontentofsinglecrystalsiliconbyinfraredspectroscopy.2,3,4,5,6,7Thistestmethodrequirestheuseofanoxygen-freereferencespecimenandasetofcalibrationstan-dards,suchasthosecomprisingNISTSRM2551.8,9Itpermits,butdoesnotrequire,theuseofacomputerizedspectropho-tometer.1.2Theusefulrangeofoxygenconcentrationmeasurablebythistestmethodisfrom131016atoms/cm3tothemaximumamountofinterstitialoxygensolubleinsilicon.1.3Theoxygenconcentrationobtainedusingthistestmethodassumesalinearrelationshipbetweentheinterstitialoxygenconcentrationandtheabsorptioncoefficientofthe1107cm−1bandassociatedwithinterstitialoxygeninsilicon.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.2.ReferencedDocuments2.1ASTMStandards:E1SpecificationforASTMThermometers10E131TerminologyRelatingtoMolecularSpectroscopy11E932PracticeforDescribingandMeasuringPerformanceofDispersiveInfraredSpectrophotometers113.Terminology3.1Fordefinitionsoftermsrelatingtoabsorptionspectros-copy,refertoTerminologyE131.3.2Definitions:3.2.1dispersiveinfrared(DIR)spectrophotometer,n—atypeofinfraredspectrometerthatusesatleastoneprismorgratingasthedispersingelement,inwhichthedataareobtainedasanamplitude-wavenumber(orwavelength)spec-trum.3.2.1.1Discussion—Somedispersiveinfraredspectrom-etersareusedinconjunctionwithacomputer,whichisusedtostoredata.Thedataarethenaccessibleformanipulati...
