Designation:F1374−92(Reapproved2012)StandardTestMethodforIonic/OrganicExtractablesofInternalSurfaces-IC/GC/FTIRforGasDistributionSystemComponents1ThisstandardisissuedunderthefixeddesignationF1374;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONSemiconductorcleanroomsareservicedbyhigh-puritygasdistributionsystems.Thistestmethodpresentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredforuseinsuchsystems.1.Scope1.1Thistestmethodestablishesaprocedurefortestingcomponentsusedinultra-high-puritygasdistributionsystemsforionicandorganicsurfaceresidues.1.2Thistestmethodappliestoin-linecomponentscontain-ingelectronicsgradematerialsinthegaseousform.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofthedetectioninstrumentsandbytheavailablelevelsofpurityinextractingsolvents.Whiletheionandgaschromatographicmethodsarequantitative,theFouriertransforminfraredspec-troscopy(FTIR)methodcanbeusedaseitheraqualitativeoraquantitativetool.Inaddition,thegaschromatography(GC)andFTIRmethodsareusedtodetecthydrocarbonsandhalogenatedsubstancesthatremainasresiduesoncomponentinternalsurfaces.Thiseliminatesthosematerialswithhighvaporpressures,whichareanalyzedperthetotalhydrocarbonstest,fromthistestmethod.1.3.2Thistestmethodisintendedforusebyoperatorswhounderstandtheuseoftheapparatusatalevelequivalenttotwelvemonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandards.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.2.ReferencedDocuments2.1ASTM...
