ASTM_F_1374_-_92_2012.pdf

Designation:F137492(Reapproved 2012)Standard Test Method forIonic/Organic Extractables of Internal Surfaces-IC/GC/FTIRfor Gas Distribution System Components1This standard is issued under the fixed designation F1374;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems.This test methodpresents a procedure that may be applied for the evaluation of one or more components considered foruse in such systems.1.Scope1.1 This test method establishes a procedure for testingcomponents used in ultra-high-purity gas distribution systemsfor ionic and organic surface residues.1.2 This test method applies to in-line components contain-ing electronics grade materials in the gaseous form.1.3 Limitations:1.3.1 This test method is limited by the sensitivity of thedetection instruments and by the available levels of purity inextracting solvents.While the ion and gas chromatographicmethods are quantitative,the Fourier transform infrared spec-troscopy(FTIR)method can be used as either a qualitative ora quantitative tool.In addition,the gas chromatography(GC)and FTIR methods are used to detect hydrocarbons andhalogenated substances that remain as residues on componentinternal surfaces.This eliminates those materials with highvapor pressures,which are analyzed per the total hydrocarbonstest,from this test method.1.3.2 This test method is intended for use by operators whounderstand the use of the apparatus at a level equivalent totwelve months of experience.1.4 The values stated in SI units are to be regarded as thestandards.The inch-pound units given in parentheses are forinformation only.1.5 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.Specific hazardstatements are given in Section 6.2.Referenced Documents2.1 ASTM Standards:2E1151 Practice for Ion Chromatography Terms and Rela-tionships2.2 Union Carbide Standard:Techniques for Measuring Trace Gas Impurities in HighPurity Gases33.Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 spool piecea null component,consisting of a straightpiece of electropolished tubing and appropriate fittings,used inplace of the test component to establish the baseline.3.1.2 standard conditions101.3 kPa,0.0C(14.73 psia,32.0F).3.1.3 test componentany device being tested,such as avalve,regulator,or filter.3.1.4 test fluid blanka volume of test solvent adequate foranalysis.3.1.4.1 DiscussionThis is used to determine the back-ground impurity concentrations in the test fluid.This fluid isdrawn at the same time as the fluid that is used to fill the spoolpiece and test component.It must be held in a container thatdoes not contaminate the fluid blank.3.2 Abbreviations:3.2.1 FTIRFourier transform infrared spectroscopy.1This test method is under the jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.10 on Contamina-tion Control.Current edition published July 1,2012.Published August 2012.Originallyapproved in 1992.Last previous edition approved in 2005 as F137492(2005).DOI:10.1520/F1374-92R12.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3Available from Linde Division Union Carbide,175 E.Park Drive,Tonawanda,NY 14151.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 3.2.2 GCgas chromatography.3.2.3 ICion chromatography.3.2.4 IPAisopropanol(2-propanol).3.2.5 MSmass spectrometry.3.2.6 ppbvparts per billion by volume(such as nL/L).3.2.7 ppbwparts per billion by weight(such as ng/g).3.2.8 ppmvparts per million by volume(such as L/L).3.2.9 ppmwparts per million by weight(such as g/g).3.2.10 psidpounds per square inch differential.3.2.11 scfmstandard cubic feet per minute.3.2.12 slpmstandard litre per minute.The gas volumetricflow rate measured in litres per minute at 0.0C(32F)and101.3 kPa(1 atm).4.Significance and Use4.1 The purpose of this test method is to define a procedurefor testing electropolished stainless steel components beingconsidered for installation into a high-purity gas distributionsystem.Application of this test method is expected to yieldcomparable data among components tested for the purposes ofqualification for this installation.5.Apparatus5.1 Materials:5.1.1 Test FluidThe purity of fluid used for the extractionswill determine the detectio