Designation:F1397−93(Reapproved2012)StandardTestMethodforDeterminationofMoistureContributionbyGasDistributionSystemComponents1ThisstandardisissuedunderthefixeddesignationF1397;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONSemiconductorcleanroomsareservicedbyhigh-puritygasdistributionsystems.Thistestmethodpresentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredforuseinsuchsystems.1.Scope1.1Thistestmethodcoverstestingcomponentsfortotalmoisturecontributiontoagasdistributionsystematambienttemperature.Inaddition,thetestmethodallowstestingatelevatedambienttemperaturesashighas70°Candofthecomponentmoisturecapacityandrecovery.1.2Thistestmethodappliestoin-linecomponentscontain-ingelectronicsgradematerialssuchasthoseusedinsemicon-ductorgasdistributionsystems.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofcurrentinstrumentation,aswellasbytheresponsetimeoftheinstrumentation.Thistestmethodisnotintendedtobeusedfortestcomponentslargerthan12.7-mm(1⁄2-in.)outsidediameternominalsize.Thistestmethodcouldbeappliedtolargercomponents;however,thestatedvolumetricflowratemaynotprovideadequatemixingtoensurearepresentativesample.Higherflowratesmayimprovethemixingbutexcessivelydilutethesample.1.3.2Thistestmethodiswrittenwiththeassumptionthattheoperatorunderstandstheuseoftheapparatusatalevelequivalenttosixmonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection5.2.Terminology2.1De...
