Designation:F1367−98(Reapproved2011)StandardSpecificationforChromiumSputteringTargetsforThinFilmApplications1ThisstandardisissuedunderthefixeddesignationF1367;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.1.Scope1.1Thisspecificationcoverssputteringtargetsfabricatedfromchromiummetal.1.2Thisspecificationsetspuritygradelevels,physicalattributes,analyticalmethodsandpackagingrequirements.1.3ThevaluesstatedinSIunitsaretoberegardedasstandard.Nootherunitsofmeasurementareincludedinthisstandard.2.ReferencedDocuments2.1ASTMStandards:2E112TestMethodsforDeterminingAverageGrainSize3.Terminology3.1DefinitionsofTermsSpecifictoThisStandard:3.1.1rawmateriallot—originalmateriallotfromwhichanumberoftargetsisfabricated.3.1.2relativedensity,n—actualtargetdensitydividedbythetheoreticaldensityofchromium,7.21g/cm2.4.Classification4.1GradesofchromiumaredefinedinTable1.4.2Grade,asdefinedinTable1,isbasedonthetotalmetallicimpuritycontentofthemetallicelementslistedinTable2.Elementsnotdetectedshallbecountedandreportedaspresentatthedetectionlimit.5.OrderingInformation5.1Ordersforthesetargetsshallincludethefollowing:5.1.1Grade,5.1.2Configuration,(see8.1and8.2),5.1.3Whethercertificationisrequired,(see12.1),and5.1.4Whetherasamplerepresentativeofthefinishedprod-uctisrequiredtobeprovidedbythesuppliertothepurchaser.6.ChemicalComposition6.1ThemetallicelementslistedinTable2shallbeassayedandreported.6.2GaseouselementstobeassayedandreportedareC,O,NandS.6.3Otherelementsmaybeassayedandreportedasagreeduponbetweenthepurchaserandthesupplier,buttheseshallnotbecountedindeterminingthegradedesignation.6.3.1Acceptablelimitsandanalyticaltechniquesforaddi-tionalelementsshallbeagreeduponbetweenthepurchaserandthesupplier.7.PhysicalProperties7.1Minimumrelativedensityshallbeagreeduponbythepurchaserandthesuppli...
