Designation:F1396−93(Reapproved2012)StandardTestMethodforDeterminationofOxygenContributionbyGasDistributionSystemComponents1ThisstandardisissuedunderthefixeddesignationF1396;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscriptepsilon(´)indicatesaneditorialchangesincethelastrevisionorreapproval.INTRODUCTIONSemiconductorcleanroomsareservicedbyhigh-puritygasdistributionsystems.Thistestmethodpresentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredforuseinsuchsystems.1.Scope1.1Thistestmethodcoversaprocedurefortestingcompo-nentsforoxygencontributiontoultra-highpuritygasdistribu-tionsystemsatambienttemperature.Inaddition,thistestmethodallowstestingofthecomponentatelevatedambienttemperaturesashighas70°C.1.2Thistestmethodappliestoin-linecomponentscontain-ingelectronicsgradematerialssuchasthoseusedinasemiconductorgasdistributionsystem.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofcurrentinstrumentation,aswellastheresponsetimeoftheinstrumen-tation.Thistestmethodisnotintendedtobeusedfortestcomponentslargerthan12.7-mm(1⁄2-in.)outsidediameternominalsize.Thistestmethodcouldbeappliedtolargercomponents;however,thestatedvolumetricflowratemaynotprovideadequatemixingtoensurearepresentativesample.Higherflowratesmayimprovethemixingbutexcessivelydilutethesample.1.3.2Thistestmethodiswrittenwiththeassumptionthattheoperatorunderstandstheuseoftheapparatusatalevelequivalenttosixmonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappro-priatesafetyandhealthpracticesanddeterminetheapplica-bilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.2.Terminology2.1Definitions...
