ASTM_D_5127_-_13.pdf

Designation:D512713Standard Guide forUltra-Pure Water Used in the Electronics andSemiconductor Industries1This standard is issued under the fixed designation D5127;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This guide provides recommendations for water qualityrelated to electronics and semiconductor-industry manufactur-ing.Seven classifications of water are described,includingwater for line widths as low as 0.032 micron.In all cases,therecommendations are for water at the point of distribution(POD).1.2 Water is used for washing and rinsing of semiconductorcomponents during manufacture.Water is also used for clean-ing and etching operations,making steam for oxidation ofsilicon surfaces,preparing photomasks,and depositing lumi-nescent materials.Other applications are in the developmentand fabrication of solid-state devices,thin-film devices,com-munication lasers,light-emitting diodes,photo-detectors,printed circuits,memory devices,vacuum-tube devices,orelectrolytic devices.1.3 Users needing water qualities different from those de-scribed here should consult other water standards,such asSpecification D1193 and Guide D5196.1.4 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2D1129 Terminology Relating to WaterD1193 Specification for Reagent WaterD1976 Test Method for Elements in Water by Inductively-Coupled Argon Plasma Atomic Emission SpectroscopyD2791 Test Method for On-line Determination of Sodium inWaterD3919 Practice for Measuring Trace Elements in Water byGraphite Furnace Atomic Absorption SpectrophotometryD4191 Test Method for Sodium in Water byAtomicAbsorp-tion SpectrophotometryD4192 Test Method for Potassium in Water by AtomicAbsorption SpectrophotometryD4327 Test Method for Anions in Water by Suppressed IonChromatographyD4453 Practice for Handling of High Purity Water SamplesD4517 Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectros-copyD5173 Test Method for On-Line Monitoring of CarbonCompounds in Water by Chemical Oxidation,by UVLight Oxidation,by Both,or by High Temperature Com-bustion Followed by Gas Phase NDIR or by ElectrolyticConductivityD5196 Guide for Bio-Applications Grade WaterD5391 Test Method for Electrical Conductivity and Resis-tivity of a Flowing High Purity Water SampleD5462 Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in WaterD5542 Test Methods for Trace Anions in High Purity Waterby Ion ChromatographyD5544 Test Method for On-Line Measurement of ResidueAfter Evaporation of High-Purity WaterD5673 Test Method for Elements in Water by InductivelyCoupled PlasmaMass SpectrometryD5996 Test Method for Measuring Anionic Contaminants inHigh-Purity Water by On-Line Ion ChromatographyD5997 Test Method for On-Line Monitoring of TotalCarbon,Inorganic Carbon in Water by Ultraviolet,Persul-fate Oxidation,and Membrane Conductivity DetectionF1094 Test Methods for Microbiological Monitoring ofWater Used for Processing Electron and MicroelectronicDevices by Direct Pressure Tap Sampling Valve and bythe Presterilized Plastic Bag Method3.Terminology3.1 DefinitionsFor definitions of terms used in this guiderefer to Terminology D1129.1This guide is under the jurisdiction of ASTM Committee D19 on Water and isthe direct responsibility of Subcommittee D19.02 on Quality Systems,Specification,and Statistics.Current edition approved Jan.1,2013.Published February 2013.Originallyapproved in 1990.Last previous edition approved in 2012 as D5127 12.DOI:10.1520/D5127-13.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 3.2 Definitions of Terms Specific to This Standard:3.2.1 total bacterial counts,ntotal number of cultureablemicroorganisms present in the named sample,excluding obli-gate anaerobic organisms,determined in accordance with TestMethods F1094.3.2.2 total organic carbon(TOC),ncarbon measured afterinorganic-carbon response has been eliminated by one of theprescribed ASTM test methods.4.Significance and Use4.1 This guide recommends the water quality required forthe electronics and microelectronics industries.High-puritywater is required to prevent contamination of products duringmanufacture,since contamination can lead to an unaccepta