ASTM_E_2735_-_14.pdf

Designation:E273514Standard Guide forSelection of Calibrations Needed for X-ray PhotoelectronSpectroscopy(XPS)Experiments1This standard is issued under the fixed designation E2735;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This guide describes an approach to enable users andanalysts to determine the calibrations and standards useful toobtain meaningful surface chemistry data with X-ray photo-electron spectroscopy(XPS)and to optimize the instrument forspecific analysis objectives and data collection time.1.2 This guide offers an organized collection of informationor a series of options and does not recommend a specific courseof action.This guide cannot replace education or experienceand should be used in conjunction with professional judgment.Not all aspects of this guide will be applicable in all circum-stances.1.3 The values stated in SI units are to be regarded asstandard.No other units of measurement are included in thisstandard.1.4 This standard is not intended to represent or replace thestandard of care by which the adequacy of a given professionalservice must be judged,nor should this document be appliedwithout consideration of a projects many unique aspects.Theword“Standard”in the title of this document means only thatthe document has been approved through the ASTM consensusprocess.1.5 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E995 Guide for Background Subtraction Techniques in Au-ger Electron Spectroscopy and X-Ray PhotoelectronSpectroscopyE996 Practice for Reporting Data in Auger Electron Spec-troscopy and X-ray Photoelectron SpectroscopyE1078 Guide for Specimen Preparation and Mounting inSurface AnalysisE1127 Guide for Depth Profiling in Auger Electron Spec-troscopyE1217 Practice for Determination of the Specimen AreaContributing to the Detected Signal in Auger ElectronSpectrometers and Some X-Ray Photoelectron Spectrom-etersE1523 Guide to Charge Control and Charge ReferencingTechniques in X-Ray Photoelectron SpectroscopyE1577 Guide for Reporting of Ion Beam Parameters Used inSurface AnalysisE1634 Guide for Performing Sputter Crater Depth Measure-mentsE1636 Practice for Analytically Describing Depth-Profileand Linescan-Profile Data by an Extended Logistic Func-tionE1829 Guide for Handling Specimens Prior to SurfaceAnalysisE2108 Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer2.2 ISO Standards:3ISO 10810 Surface Chemical AnalysisDepth ProfilingMeasurement of Sputtered DepthISO 14606 Surface Chemical AnalysisSputter DepthProfilingOptimisation Using Layered Systems as Ref-erence MaterialsISO 14701 Surface Chemical AnalysisX-ray Photoelec-tron SpectroscopyMeasurement of Silicon Oxide Thick-nessISO 14976 Surface Chemical AnalysisData Transfer For-matISO 15470 Surface Chemical AnalysisX-ray Photoelec-tron SpectroscopyDescription of Selected InstrumentalPerformance Parameters1This guide is under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.03 on Auger ElectronSpectroscopy and X-Ray Photoelectron Spectroscopy.Current edition approved Feb.1,2014.Published February 2014.Originallyapproved in 2013.Last previous edition approved in 2013 as E273513.DOI:10.1520/E2735-14.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3Available from American National Standards Institute(ANSI),25 W.43rd St.,4th Floor,New York,NY 10036,http:/www.ansi.org.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 ISO 15472 Surface Chemical AnalysisX-ray Photoelec-tron SpectrometersCalibration of Energy ScalesISO/TR15969 SurfaceChemicalAnalysisDepthProfilingMeasurement of Sputtered DepthISO 18115-1 Surface Chemical AnalysisVocabularyPart 1:General Terms and Terms Used in SpectroscopyISO 18115-2 Surface Chemical AnalysisVocabularyPart 2:Terms Used in Scanning-Probe MicroscopyISO 18116 Surface Chemical AnalysisGuidelines forPreparation and Mounting of Specimens for AnalysisISO 18117 Surface Chemical AnalysisHandling of Speci-mens Prior to AnalysisISO 18118 Surface Chemical AnalysisAuger ElectronSpectroscopy and X-ray Photoelectron SpectroscopyGuide to the Use of Experimentally Determined RelativeSensitivity Factors for the Quantitative Analysis of Ho-mogene