ASTM_D_5127_-_13_2018.pdf

Designation:D512713(Reapproved 2018)Standard Guide forUltra-Pure Water Used in the Electronics andSemiconductor Industries1This standard is issued under the fixed designation D5127;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This guide provides recommendations for water qualityrelated to electronics and semiconductor-industry manufactur-ing.Seven classifications of water are described,includingwater for line widths as low as 0.032 m.In all cases,therecommendations are for water at the point of distribution(POD).1.2 Water is used for washing and rinsing of semiconductorcomponents during manufacture.Water is also used for clean-ing and etching operations,making steam for oxidation ofsilicon surfaces,preparing photomasks,and depositing lumi-nescent materials.Other applications are in the developmentand fabrication of solid-state devices,thin-film devices,com-munication lasers,light-emitting diodes,photo-detectors,printed circuits,memory devices,vacuum-tube devices,orelectrolytic devices.1.3 Users needing water qualities different from those de-scribed here should consult other water standards,such asSpecification D1193 and Guide D5196.1.4 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety,health,and environmental practices and deter-mine the applicability of regulatory limitations prior to use.1.5 This international standard was developed in accor-dance with internationally recognized principles on standard-ization established in the Decision on Principles for theDevelopment of International Standards,Guides and Recom-mendations issued by the World Trade Organization TechnicalBarriers to Trade(TBT)Committee.2.Referenced Documents2.1 ASTM Standards:2D1129 Terminology Relating to WaterD1193 Specification for Reagent WaterD1976 Test Method for Elements in Water by Inductively-Coupled Plasma Atomic Emission SpectroscopyD2791 Test Method for On-line Determination of Sodium inWaterD3919 Practice for Measuring Trace Elements in Water byGraphite Furnace Atomic Absorption SpectrophotometryD4191 Test Method for Sodium in Water byAtomicAbsorp-tion SpectrophotometryD4192 Test Method for Potassium in Water by AtomicAbsorption SpectrophotometryD4327 Test Method for Anions in Water by Suppressed IonChromatographyD4453 Practice for Handling of High Purity Water SamplesD4517 Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectros-copyD5173 Guide for On-Line Monitoring of Total OrganicCarbon in Water by Oxidation and Detection of ResultingCarbon DioxideD5196 Guide for Bio-Applications Grade WaterD5391 Test Method for Electrical Conductivity and Resis-tivity of a Flowing High Purity Water SampleD5462 Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in WaterD5542 Test Methods for Trace Anions in High Purity Waterby Ion ChromatographyD5544 Test Method for On-Line Measurement of ResidueAfter Evaporation of High-Purity WaterD5673 Test Method for Elements in Water by InductivelyCoupled PlasmaMass Spectrometry1This guide is under the jurisdiction of ASTM Committee D19 on Water and isthe direct responsibility of Subcommittee D19.02 on Quality Systems,Specification,and Statistics.Current edition approved Oct.15,2018.Published November 2018.Originallyapproved in 1990.Last previous edition approved in 2013 as D5127 13.DOI:10.1520/D5127-13R18.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United StatesThis international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for theDevelopment of International Standards,Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade(TBT)Committee.1 D5996 Test Method for Measuring Anionic Contaminants inHigh-Purity Water by On-Line Ion ChromatographyD5997 Test Method for On-Line Monitoring of TotalCarbon,Inorganic Carbon in Water by Ultraviolet,Persul-fate Oxidation,and Membrane Conductivity DetectionF1094 Test Methods for Microbiological Monitoring ofWater Used for Processing Electron and MicroelectronicDevices by Direct Pressure Tap Sampling Valve and bythe Presterilized Plastic Bag Method3.Terminology3.1 Definitions:3.1.1 For definitions of terms used in this standard,refer toTerminology D1129.3.2 Definitions of Terms Specific to This Standard:3.2.1 to