ASTM_E_1016_-_07_2012e1.pdf

Designation:E101607(Reapproved 2012)1Standard Guide forLiterature Describing Properties of Electrostatic ElectronSpectrometers1This standard is issued under the fixed designation E1016;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1NOTEEditorial corrections were made throughout in November 2012.1.Scope1.1 The purpose of this guide is to familiarize the analystwith some of the relevant literature describing the physicalproperties of modern electrostatic electron spectrometers.1.2 This guide is intended to apply to electron spectrometersgenerally used in Auger electron spectroscopy(AES)andX-ray photoelectron spectroscopy(XPS).1.3 The values stated in inch-pound units are to be regardedas standard.No other units of measurement are included in thisstandard.1.4 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E673 Terminology Relating to Surface Analysis(Withdrawn2012)3E902 Practice for Checking the Operating Characteristics ofX-Ray Photoelectron Spectrometers(Withdrawn 2011)3E1217 Practice for Determination of the Specimen AreaContributing to the Detected Signal in Auger ElectronSpectrometers and Some X-Ray Photoelectron Spectrom-etersE2108 Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer2.2 ISO Standards:4ISO 18516 Surface Chemical AnalysisAuger ElectronSpectroscopy and X-Ray Photoelectron SpectrsocopyDetermination of Lateral ResolutionISO 21270 Surface Chemical AnalysisX-Ray Photoelec-tron and Auger Electron SpectrometersLinearity ofIntensity ScaleISO 24236 Surface Chemical AnalysisAuger ElectronSpectroscopyRepeatability and Constancy of IntensityScaleISO 24237 Surface Chemical AnalysisX-Ray Photoelec-tron SpectroscopyRepeatability and Constancy of In-tensity Scale3.Terminology3.1 For definitions of terms used in this guide,refer toTerminology E673.4.Summary of Guide4.1 This guide serves as a resource for relevant literaturewhich describes the properties of electron spectrometers com-monly used in surface analysis.5.Significance and Use5.1 The analyst may use this document to obtain informa-tion on the properties of electron spectrometers and instrumen-tal aspects associated with quantitative surface analysis.6.General Description of Electron Spectrometers6.1 An electron spectrometer is typically used to measurethe energy and angular distributions of electrons emitted froma specimen,typically for energies in the range 0 to 2500 eV.Insurface analysis applications,the analyzed electrons are pro-duced from the bombardment of a sample surface withelectrons,photons or ions.The entire spectrometer instrumentmay include one or more of the following:(1)apertures todefine the specimen area and emission solid angle for the1This guide is under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.03 on Auger ElectronSpectroscopy and X-Ray Photoelectron Spectroscopy.Current edition approved Nov.1,2012.Published December 2012.Originallyapproved in 1984.Last previous edition approved in 2007 as E1016 07.DOI:10.1520/E1016-07R12E01.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3The last approved version of this historical standard is referenced onwww.astm.org.4Available from International Organization for Standardization(ISO),1 rue deVaremb,Case postale 56,CH-1211,Geneva 20,Switzerland,http:/www.iso.ch.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 electrons accepted for analysis;(2)an electrostatic or magneticlens system,or both;(3)an electrostatic(dispersing)analyzer;and(4)a detector.Methods to check the operating character-istics of X-ray photoelectron spectrometers are reported inPractice E902.6.2 Intensity Scale Calibration and Spectrometer Transmis-sion FunctionQuantitative analysis requires the determina-tion of the ability of the spectrometer to transmit electrons,andthe resultant detector signal,throughout the spectrometerinstrument.This can be described by an overall electronenergy-dependent transmission function Q(E)and is given bythe product(1,2),5as follows:QE!5 HE!TE!DE!FE!,(1)where:H(E)=the effect of mechanical imperfections(such asaberrations,fringing fields,etc.),T(E)=electron-optical transmission function,D(E)=detector efficiency,andF(E)=efficien