2011_2021.pdf

ASME B89.1.8-2011Performance Evaluation of Displacement-Measuring Laser InterferometersAN AMERICAN NATIONAL STANDARDREAFFIRMED 2021ASME B89.1.8-2011PerformanceEvaluation ofDisplacement-Measuring LaserInterferometersAN AMERICAN NATIONAL STANDARDThree Park Avenue New York,NY 10016 USADate of Issuance:March 30,2012This Standard will be revised when the Society approves the issuance of a new edition.ASME issues written replies to inquiries concerning interpretations of technical aspects of thisStandard.Periodically certain actions of the ASME B89 Committee may be published as Cases.Casesand interpretations are published on the ASME Web site under the Committee Pages athttp:/cstools.asme.org/as they are issued.Errata to codes and standards may be posted on the ASME Web site under the Committee Pages toprovide corrections to incorrectly published items,or to correct typographical or grammatical errorsin codes and standards.Such errata shall be used on the date posted.The Committee Pages can be found at http:/cstools.asme.org/.There is an option available toautomatically receive an e-mail notification when errata are posted to a particular code or standard.ThisoptioncanbefoundontheappropriateCommitteePageafterselecting“Errata”inthe“PublicationInformation”section.ASME is the registered trademark of The American Society of Mechanical Engineers.This code or standard was developed under procedures accredited as meeting the criteria for American NationalStandards.The Standards Committee that approved the code or standard was balanced to assure that individuals fromcompetent and concerned interests have had an opportunity to participate.The proposed code or standard was madeavailable forpublic review andcomment thatprovides an opportunityfor additional publicinput from industry,academia,regulatory agencies,and the public-at-large.ASME does not“approve,”“rate,”or“endorse”any item,construction,proprietary device,or activity.ASME does not take any position with respect to the validity of any patent rights asserted in connection with anyitems mentioned in this document,and does not undertake to insure anyone utilizing a standard against liability forinfringement of any applicable letters patent,nor assumes any such liability.Users of a code or standard are expresslyadvised that determination of the validity of any such patent rights,and the risk of infringement of such rights,isentirely their own responsibility.Participation by federal agency representative(s)or person(s)affiliated with industry is not to be interpreted asgovernment or industry endorsement of this code or standard.ASME accepts responsibility for only those interpretations of this document issued in accordance with the establishedASME procedures and policies,which precludes the issuance of interpretations by individuals.No part of this document may be reproduced in any form,in an electronic retrieval system or otherwise,without the prior written permission of the publisher.The American Society of Mechanical EngineersThree Park Avenue,New York,NY 10016-5990Copyright 2012 byTHE AMERICAN SOCIETY OF MECHANICAL ENGINEERSAll rights reservedPrinted in U.S.A.CONTENTSForeword.ivCommittee Roster.vCorrespondence With the B89 Committee.vi1Scope.12Definitions.13System Performance Evaluation:General Considerations.54Test Procedure Laser Interferometer Comparison Test.75Verifying Test Performance,Estimating Bias in the Test,and Uncertainty ofResults.166Measurement Evaluation.197References.22Figure2-1Schematic Illustration of the Abbe Offset.2Tables4.2-1Recommended Target Positions.84.7.2-1Sensitivity Coefficients Associated With LDE.124.8-1Wavelength Corrections(Parts in 106)for Low Humidity Air(25%RH).134.8-2Wavelength Corrections(Parts in 106)for Medium Humidity Air(50%RH).134.8-3Wavelength Corrections(Parts in 106)for High Humidity Air(75%RH).144.8-4Combinations of Environmental Conditions.14Forms4.10-1Reporting Results for Intercomparison Test.174.10-2Reporting Results for Sensor Calibration.174.10-3Reporting Overall Result.176-1Sample Uncertainty Budget:Errors Predictable by Manufacturer.206-2Sample Uncertainty Budget:Combining Manufacturers Reported UncertaintyWith Additional Sources of Error for a Metrology Laboratory.21Nonmandatory AppendicesAUncertainty Budget for Interferometric Length Measurements.25BMethods for Comparing Two Interferometer Systems.33CPerforming Accurate Linear Measurements With a Laser InterferometerSystem Best Procedures and Practices.41DRetesting of Interferometer Systems.49EAC Interferometers Versus DC Interferometers.50FSuggestions for Testing the Master Interferometer and EstimatingUncertainty.51iiiFOREWORDLaser interferometry has become the preferred way to measure machine tool and coordinatemeasuring machine(CMM)linear displacement accuracy.Laser interferometers are also used asthe main incremental radius-measuring devices in other dimensional measuring systems,suchas laser trackers.The laser interferometer is preferred because of its v